Experimental determination of thermal profiles during laser spike annealing with quantitative comparison to 3-dimensional simulations

Krishna Iyengar; Byungki Jung; Michael Willemann; Paulette Clancy; Michael O. Thompson

doi:10.1063/1.4717745

Experimental determination of thermal profiles during laser spike annealing with quantitative comparison to 3-dimensional simulations

Krishna Iyengar
, Byungki Jung
, Michael Willemann
, Paulette Clancy
, Michael O. Thompson

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

Thin film platinum resistors were used to directly measure temperature profiles during laser spike annealing (LSA) with high spatial and temporal resolution. Observed resistance changes were calibrated to absolute temperatures using the melting points of the substrate silicon and thin gold films. Both the time-dependent temperature experienced by the sample during passage of the focussed laser beam and profiles across the spatially dependent laser intensity were obtained with sub-millisecond time resolution and 50 m spatial resolution. Full 3-dimensional simulations incorporating both optical and thermal variations of material parameters were compared with these results. Accounting properly for the specific material parameters, good agreement between experiments and simulations was achieved. Future temperature measurements in complex environments will permit critical evaluation of LSA simulations methodologies.

Original language	English
Article number	211915
Journal	Applied Physics Letters
Volume	100
Issue number	21
DOIs	https://doi.org/10.1063/1.4717745
State	Published - May 21 2012
Externally published	Yes

Funding

The authors would like to thank the Semiconductor Research Corporation (SRC) for funding and Intel for the gift of computer resources, and invaluable help from Florencia Paredes for experimental measurements. Work made use of facilities in the Cornell Center for Materials Research (NSF-DMR 0520404) and the Cornell Nanoscale Facility (NSF-ECS 0335765).

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10.1063/1.4717745

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title = "Experimental determination of thermal profiles during laser spike annealing with quantitative comparison to 3-dimensional simulations",

abstract = "Thin film platinum resistors were used to directly measure temperature profiles during laser spike annealing (LSA) with high spatial and temporal resolution. Observed resistance changes were calibrated to absolute temperatures using the melting points of the substrate silicon and thin gold films. Both the time-dependent temperature experienced by the sample during passage of the focussed laser beam and profiles across the spatially dependent laser intensity were obtained with sub-millisecond time resolution and 50 m spatial resolution. Full 3-dimensional simulations incorporating both optical and thermal variations of material parameters were compared with these results. Accounting properly for the specific material parameters, good agreement between experiments and simulations was achieved. Future temperature measurements in complex environments will permit critical evaluation of LSA simulations methodologies.",

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AU - Thompson, Michael O.

PY - 2012/5/21

Y1 - 2012/5/21

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AB - Thin film platinum resistors were used to directly measure temperature profiles during laser spike annealing (LSA) with high spatial and temporal resolution. Observed resistance changes were calibrated to absolute temperatures using the melting points of the substrate silicon and thin gold films. Both the time-dependent temperature experienced by the sample during passage of the focussed laser beam and profiles across the spatially dependent laser intensity were obtained with sub-millisecond time resolution and 50 m spatial resolution. Full 3-dimensional simulations incorporating both optical and thermal variations of material parameters were compared with these results. Accounting properly for the specific material parameters, good agreement between experiments and simulations was achieved. Future temperature measurements in complex environments will permit critical evaluation of LSA simulations methodologies.

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VL - 100

JO - Applied Physics Letters

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IS - 21

M1 - 211915

ER -

Experimental determination of thermal profiles during laser spike annealing with quantitative comparison to 3-dimensional simulations

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