Abstract
Sensitive detection of harmful chemicals in industrial applications is pertinent to safety. In this work, we demonstrate the use of a sensitive silicon microcantilever (MC) system with a porous silicon oxide layer deposited on the active side of the MCs that have been mechanically manipulated to increase sensitivity. Included is the evaluation of porous silicon oxide present on different geometries of MCs and exposed to varying concentrations of hydrogen fluoride in humid air. Profilometry and the signal generated by the stress-induced porous silicon oxide (PSO) coating and bending of the MC were used as methods of evaluation.
| Original language | English |
|---|---|
| Pages (from-to) | 6272-6276 |
| Number of pages | 5 |
| Journal | Analytical Chemistry |
| Volume | 89 |
| Issue number | 11 |
| DOIs | |
| State | Published - Jun 6 2017 |
Funding
The work performed was supported by the Laboratory Director's Research and Development Program of Oak Ridge National Laboratory. Part of the research was supported by the Center for Nanophase Materials Sciences, which is sponsored at Oak Ridge National Laboratory by the Scientific User Facilities Division, Office of Basic Energy Sciences, U.S. Department of Energy. This work was supported by the United States Department of Energy (DOE) NA-22. Oak Ridge National Laboratory is operated for the U.S. Department of Energy by UT-Battelle under Contract No. DE-AC05- 00OR22725.
| Funders | Funder number |
|---|---|
| Center for Nanophase Materials Sciences | |
| Office of Basic Energy Sciences | |
| Scientific User Facilities Division | |
| UT-Battelle | DE-AC05- 00OR22725 |
| United States Department of Energy | |
| U.S. Department of Energy | NA-22 |
| Oak Ridge National Laboratory |