Ethanol vapor detection in aqueous environments using micro-capacitors and dielectric polymers

Dennis L. McCorkle, Robert J. Warmack, Sanjay V. Patel, Todd Mlsna, Scott R. Hunter, Thomas L. Ferrell

Research output: Contribution to journalArticlepeer-review

41 Scopus citations

Abstract

A technique for the measurement of ethanol concentrations in aqueous mixtures is reported, in which a permeable membrane is used to transport ethanol vapors to a microelectromechanical (MEMS) chemi-capacitor array. The fixed plate micro-capacitors were filled with a polymeric dielectric material, siloxanefluoro alcohol (SXFA), whose dielectric constant increased upon absorption of ethanol vapor. Measurements of the mixture's liquid-phase concentration were made in the vapor-phase by sampling the saturated vapors through a hydrophobic, vapor permeable nanopore filter. The performance of these sensors was characterized over a range of ethanol/water mixture concentrations and flow cell temperatures. The limit of detection (LOD) for ethanol in water using the capacitive micro-sensors in the present arrangement was found to be 40 ppm.

Original languageEnglish
Pages (from-to)892-903
Number of pages12
JournalSensors and Actuators, B: Chemical
Volume107
Issue number2
DOIs
StatePublished - Jun 29 2005
Externally publishedYes

Funding

We would like to thank Oak Ridge National Laboratory for their support and use of their facilities, particularly J.E. Hardy. The readout electronics were designed by C.L. Britton and a number of colleagues at ORNL. Funding for this project came primarily from the National Institute of Alcoholism and Alcohol Abuse under Contract No. N01AA23012

FundersFunder number
National Institute on Alcohol Abuse and AlcoholismN01AA23012

    Keywords

    • Alcohol sensing
    • Dielectric polymers
    • MEMS chemi-capacitor array
    • Micro-capacitors

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