Abstract
A technique for the measurement of ethanol concentrations in aqueous mixtures is reported, in which a permeable membrane is used to transport ethanol vapors to a microelectromechanical (MEMS) chemi-capacitor array. The fixed plate micro-capacitors were filled with a polymeric dielectric material, siloxanefluoro alcohol (SXFA), whose dielectric constant increased upon absorption of ethanol vapor. Measurements of the mixture's liquid-phase concentration were made in the vapor-phase by sampling the saturated vapors through a hydrophobic, vapor permeable nanopore filter. The performance of these sensors was characterized over a range of ethanol/water mixture concentrations and flow cell temperatures. The limit of detection (LOD) for ethanol in water using the capacitive micro-sensors in the present arrangement was found to be 40 ppm.
Original language | English |
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Pages (from-to) | 892-903 |
Number of pages | 12 |
Journal | Sensors and Actuators, B: Chemical |
Volume | 107 |
Issue number | 2 |
DOIs | |
State | Published - Jun 29 2005 |
Externally published | Yes |
Funding
We would like to thank Oak Ridge National Laboratory for their support and use of their facilities, particularly J.E. Hardy. The readout electronics were designed by C.L. Britton and a number of colleagues at ORNL. Funding for this project came primarily from the National Institute of Alcoholism and Alcohol Abuse under Contract No. N01AA23012
Funders | Funder number |
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National Institute on Alcohol Abuse and Alcoholism | N01AA23012 |
Keywords
- Alcohol sensing
- Dielectric polymers
- MEMS chemi-capacitor array
- Micro-capacitors