Etching-enhanced ablation and the formation of a microstructure in silicon by laser irradiation in an SF6 atmosphere

S. Jesse; A. J. Pedraza; J. D. Fowlkes; J. D. Budai

doi:10.1557/JMR.2002.0148

Etching-enhanced ablation and the formation of a microstructure in silicon by laser irradiation in an SF₆ atmosphere

S. Jesse, A. J. Pedraza, J. D. Fowlkes, J. D. Budai

Research output: Contribution to journal › Article › peer-review

28 Scopus citations

Abstract

Sequential pulsed-laser irradiation of silicon in SF₆ atmospheres induced the formation of an ensemble of microholes and microcones. Profilometry measurements and direct imaging with an intensifying charge-coupled device camera were used to study the evolution of this microstructure and the laser-generated plume. Both the partial pressure of SF₆ and the total pressure of an SF₆-inert gas mixture strongly influenced the maximum height that the microcones attained over the initial surface. The cones first grew continuously with the number of pulses, reached a maximum, and then began to recede as the number of laser pulses increased further. The growth of the cones was closely connected with the evolution of the laser-generated plume.

Original language	English
Pages (from-to)	1002-1013
Number of pages	12
Journal	Journal of Materials Research
Volume	17
Issue number	5
DOIs	https://doi.org/10.1557/JMR.2002.0148
State	Published - May 2002
Externally published	Yes

Funding

This research was sponsored by the National Science Foundation Grant No. DMR-9901238 and by the Oak Ridge National Laboratory, managed by UT-Battelle, LLC, for the U.S. Department of Energy under Contract DE-AC05-00OR22725.

Funders	Funder number
UT-Battelle
National Science Foundation	DMR-9901238
U.S. Department of Energy	DE-AC05-00OR22725
Oak Ridge National Laboratory

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@article{c6acc7a3f3594c039793b091c53f7649,

title = "Etching-enhanced ablation and the formation of a microstructure in silicon by laser irradiation in an SF6 atmosphere",

abstract = "Sequential pulsed-laser irradiation of silicon in SF6 atmospheres induced the formation of an ensemble of microholes and microcones. Profilometry measurements and direct imaging with an intensifying charge-coupled device camera were used to study the evolution of this microstructure and the laser-generated plume. Both the partial pressure of SF6 and the total pressure of an SF6-inert gas mixture strongly influenced the maximum height that the microcones attained over the initial surface. The cones first grew continuously with the number of pulses, reached a maximum, and then began to recede as the number of laser pulses increased further. The growth of the cones was closely connected with the evolution of the laser-generated plume.",

author = "S. Jesse and Pedraza, {A. J.} and Fowlkes, {J. D.} and Budai, {J. D.}",

year = "2002",

month = may,

doi = "10.1557/JMR.2002.0148",

language = "English",

volume = "17",

pages = "1002--1013",

journal = "Journal of Materials Research",

issn = "0884-2914",

publisher = "Springer",

number = "5",

}

TY - JOUR

T1 - Etching-enhanced ablation and the formation of a microstructure in silicon by laser irradiation in an SF6 atmosphere

AU - Jesse, S.

AU - Pedraza, A. J.

AU - Fowlkes, J. D.

AU - Budai, J. D.

PY - 2002/5

Y1 - 2002/5

N2 - Sequential pulsed-laser irradiation of silicon in SF6 atmospheres induced the formation of an ensemble of microholes and microcones. Profilometry measurements and direct imaging with an intensifying charge-coupled device camera were used to study the evolution of this microstructure and the laser-generated plume. Both the partial pressure of SF6 and the total pressure of an SF6-inert gas mixture strongly influenced the maximum height that the microcones attained over the initial surface. The cones first grew continuously with the number of pulses, reached a maximum, and then began to recede as the number of laser pulses increased further. The growth of the cones was closely connected with the evolution of the laser-generated plume.

AB - Sequential pulsed-laser irradiation of silicon in SF6 atmospheres induced the formation of an ensemble of microholes and microcones. Profilometry measurements and direct imaging with an intensifying charge-coupled device camera were used to study the evolution of this microstructure and the laser-generated plume. Both the partial pressure of SF6 and the total pressure of an SF6-inert gas mixture strongly influenced the maximum height that the microcones attained over the initial surface. The cones first grew continuously with the number of pulses, reached a maximum, and then began to recede as the number of laser pulses increased further. The growth of the cones was closely connected with the evolution of the laser-generated plume.

UR - http://www.scopus.com/inward/record.url?scp=0036564751&partnerID=8YFLogxK

U2 - 10.1557/JMR.2002.0148

DO - 10.1557/JMR.2002.0148

M3 - Article

AN - SCOPUS:0036564751

SN - 0884-2914

VL - 17

SP - 1002

EP - 1013

JO - Journal of Materials Research

JF - Journal of Materials Research

IS - 5

ER -

Etching-enhanced ablation and the formation of a microstructure in silicon by laser irradiation in an SF₆ atmosphere

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