Estimation of detection limits in electron probe X-ray microanalysis

I. M. Romanenko; A. A. Viryus; V. A. Churin; A. S. Deyanov; A. S. Ivanov

doi:10.1134/S1027451012070105

Estimation of detection limits in electron probe X-ray microanalysis

I. M. Romanenko, A. A. Viryus, V. A. Churin, A. S. Deyanov, A. S. Ivanov

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Different local methods of analysis are estimated with the aim of revealing the possibility for determining the minimum concentrations of chemical elements. Among all examined approaches, electron probe X-ray microanalysis (EPMA) has been chosen as the most accurate and promising technique. The dependences between the elemental detection limit and the analyzer's technical parameters are investigated. It has been ascertained that the experimentally determined detection limits of light elements are substantially higher than those of heavy elements. The reasons leading to the less efficient EPMA of light elements, as well as possible ways of elimination thereof, are discussed. It is demonstrated that an X-ray mirror can be used to reach the theoretically predicted detection limits of B, O, and C.

Original language	English
Pages (from-to)	616-622
Number of pages	7
Journal	Surface Investigation X-Ray, Synchrotron and Neutron Techniques
Volume	6
Issue number	4
DOIs	https://doi.org/10.1134/S1027451012070105
State	Published - Jul 2012
Externally published	Yes

Funding

ACKNOWLEDGMENTS This study was supported in part by the Russian Foundation for Basic Research (project no. 09 05 00926) and the Development and Improvement of the Methods applied to the Chemical Analysis and Inves tigation of Material Structures fundamental research program no. 8 of the Presidium of the Russian Acad emy of Sciences

Funders	Funder number
Russian Acad emy of Sciences
Russian Foundation for Basic Research	09 05 00926

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abstract = "Different local methods of analysis are estimated with the aim of revealing the possibility for determining the minimum concentrations of chemical elements. Among all examined approaches, electron probe X-ray microanalysis (EPMA) has been chosen as the most accurate and promising technique. The dependences between the elemental detection limit and the analyzer's technical parameters are investigated. It has been ascertained that the experimentally determined detection limits of light elements are substantially higher than those of heavy elements. The reasons leading to the less efficient EPMA of light elements, as well as possible ways of elimination thereof, are discussed. It is demonstrated that an X-ray mirror can be used to reach the theoretically predicted detection limits of B, O, and C.",

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AU - Churin, V. A.

AU - Deyanov, A. S.

AU - Ivanov, A. S.

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Estimation of detection limits in electron probe X-ray microanalysis

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