Abstract
Polycrystalline silicon carbide was deposited from methyltrichlorosilane in cold-walled and hot-walled reactors, on (100) SiC surface layers that were formed on (100) Si wafers. The initial stages of the process were studied by electron microscopy after relatively short deposition times. Submicron surface features nucleated with a specific crystallographic orientation with respect to the substrate, where h i l l j planes in theb-SiC substrate coincided with hOOOl j planes in the a-Si C features. These a-Si C features occurred only at twins on h i l l j planes of the b - S i C substrate. This demonstrates that nucleation under these conditions is controlled by defects in the substrate. Surface contamination and the reactor configuration also had substantial effects on nucleation.
| Original language | English |
|---|---|
| Pages (from-to) | 1086-1092 |
| Number of pages | 7 |
| Journal | Journal of Materials Research |
| Volume | 8 |
| Issue number | 5 |
| DOIs | |
| State | Published - May 1993 |
| Externally published | Yes |
Funding
This research was sponsored by the United States Air Force Office of Scientific Research under interagency agreement DOE No. 1854-C027-A1, USAF No. AFOSR-ISSA-91-0003, under Contract DE-AC05-84OR21400 with Martin Marietta Energy Systems, Inc. The TEM facility is sponsored by the United States Department of Energy, Assistant Secretary for Conservation and Renewable Energy, Office of Transportation Technologies, as part of the High Temperature Materials Laboratory User Program, under Contract DE-AC05-84OR214 with Martin Marietta Energy Systems, Inc. One of us (BWS) was also partially supported by the Air Force Office of Scientific Research under Grant AFOSR-91-0357 with Brown University. We are grateful to Professor R. F. Davis and Dr. L. J. Schioler for useful discussions, R. Steele for the SEM work, H. Livesey for preparing the figures, and K. B. Alexander, R. Csencsits, J. Rankin, and T. N. Tiegs for reviewing the manuscript.
| Funders | Funder number |
|---|---|
| Assistant Secretary for Conservation and Renewable Energy | |
| Office of Transportation Technologies | DE-AC05-84OR214 |
| United States Air Force Office of Scientific Research | |
| U.S. Department of Energy | 1854-C027-A1 |
| Air Force Office of Scientific Research | AFOSR-91-0357 |
| Brown University | |
| U.S. Air Force | AFOSR-ISSA-91-0003, DE-AC05-84OR21400 |