TY - JOUR
T1 - Epitaxial recrystallization and diffusion phenomena in amorphous silicon produced by MeV ion beams
AU - Poate, J. M.
AU - Priolo, F.
AU - Jacobson, D. C.
AU - Batstone, J. L.
AU - Thompson, Michael O.
PY - 1989/2/2
Y1 - 1989/2/2
N2 - Diffusion and interfacial segregation phenomena occurring in the Si amorphous-crystal system under MeV Ar ion irradiation are reviewed. Implanted Au, Ag and Cu in amorphous Si undergo radiation enhanced diffusion in the temperature range 300-700 K with Arrhenius-like behavior with activation energies of 0.37, 0.39 and 0.17 eV respectively. Segregation and trapping of Au at the amorphous-crystal interface occurs when recrystallization is induced with 2.5 MeV Ar ion irradiation. The Au segregation is analogous to behavior at liquid-solid interfaces. The Au is trapped in crystalline Si at concentrations some ten orders of magnitude in excess of equilibrium concentration.
AB - Diffusion and interfacial segregation phenomena occurring in the Si amorphous-crystal system under MeV Ar ion irradiation are reviewed. Implanted Au, Ag and Cu in amorphous Si undergo radiation enhanced diffusion in the temperature range 300-700 K with Arrhenius-like behavior with activation energies of 0.37, 0.39 and 0.17 eV respectively. Segregation and trapping of Au at the amorphous-crystal interface occurs when recrystallization is induced with 2.5 MeV Ar ion irradiation. The Au segregation is analogous to behavior at liquid-solid interfaces. The Au is trapped in crystalline Si at concentrations some ten orders of magnitude in excess of equilibrium concentration.
UR - https://www.scopus.com/pages/publications/0024608021
U2 - 10.1016/0168-583X(89)90333-9
DO - 10.1016/0168-583X(89)90333-9
M3 - Article
AN - SCOPUS:0024608021
SN - 0168-583X
VL - 37-38
SP - 955
EP - 959
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - C
ER -