Epitaxial growth of MgO/TiN multilayers on Cu

K. H. Kim; D. P. Norton; D. K. Christen; C. Cantoni; M. Paranthaman; T. Aytug

doi:10.1016/j.vacuum.2008.10.002

Epitaxial growth of MgO/TiN multilayers on Cu

K. H. Kim, D. P. Norton, D. K. Christen, C. Cantoni, M. Paranthaman, T. Aytug

Nanomaterials Chemistry Group

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

The growth of epitaxial MgO/TiN multilayer films on (001) Cu has been investigated. In particular, epitaxial structures were grown on (001) Cu layers that were epitaxial on (001) SrTiO₃. X-ray diffraction and reflection high-energy electron diffraction indicate that the multilayer structures are epitaxial on the (001) Cu surface. The motivation is the use of crystalline MgO/TiN multilayers as a diffusion barrier to both copper and oxygen. MgO/TiN multilayers are potentially useful as diffusion barriers for Cu interconnects on semiconductors as well as for superconducting wires based on the epitaxial growth of cuprate superconductors on biaxially textured copper.

Original language	English
Pages (from-to)	897-901
Number of pages	5
Journal	Vacuum
Volume	83
Issue number	5
DOIs	https://doi.org/10.1016/j.vacuum.2008.10.002
State	Published - Jan 1 2009

Funding

This work was partially supported by the National Science Foundation under grant CHE-0304810. The ORNL research was sponsored by the U.S. Department of Energy under contract with UT-Battelle, LLC.

Funders	Funder number
National Science Foundation	CHE-0304810
U.S. Department of Energy
Oak Ridge National Laboratory

Keywords

Copper
Diffusion barriers
Epitaxy
Magnesium oxide
Oxides
Pulsed-laser deposition
Superconductivity
Titanium nitride

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10.1016/j.vacuum.2008.10.002

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abstract = "The growth of epitaxial MgO/TiN multilayer films on (001) Cu has been investigated. In particular, epitaxial structures were grown on (001) Cu layers that were epitaxial on (001) SrTiO3. X-ray diffraction and reflection high-energy electron diffraction indicate that the multilayer structures are epitaxial on the (001) Cu surface. The motivation is the use of crystalline MgO/TiN multilayers as a diffusion barrier to both copper and oxygen. MgO/TiN multilayers are potentially useful as diffusion barriers for Cu interconnects on semiconductors as well as for superconducting wires based on the epitaxial growth of cuprate superconductors on biaxially textured copper.",

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AU - Kim, K. H.

AU - Norton, D. P.

AU - Christen, D. K.

AU - Cantoni, C.

AU - Paranthaman, M.

AU - Aytug, T.

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KW - Copper

KW - Diffusion barriers

KW - Epitaxy

KW - Magnesium oxide

KW - Oxides

KW - Pulsed-laser deposition

KW - Superconductivity

KW - Titanium nitride

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Epitaxial growth of MgO/TiN multilayers on Cu

Abstract

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