Electroplate and lift lithography for patterned micro/nanowires using ultrananocrystalline diamond (UNCD) as a reusable template

David B. Seley, Daniel A. Dissing, Anirudha V. Sumant, Ralu Divan, Suzanne Miller, Orlando Auciello, Lori A. Lepak, Eric A. Terrell, Tyler J. Shogren, Daryl A. Fahrner, James P. Hamilton, Michael P. Zach

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

A fast, simple, scalable technique is described for the controlled, solution-based, electrochemical synthesis of patterned metallic and semiconducting nanowires from reusable, nonsacrificial, ultrananocrystalline diamond (UNCD) templates. This enables the repeated fabrication of arrays of complex patterns of nanowires, potentially made of any electrochemically depositable material. Unlike all other methods of patterning nanowires, this benchtop technique quickly mass-produces patterned nanowires whose diameters are not predefined by the template, without requiring intervening vacuum or clean room processing. This technique opens a pathway for studying nanoscale phenomena with minimal equipment, allowing the process-scale development of a new generation of nanowire-based devices.

Original languageEnglish
Pages (from-to)925-930
Number of pages6
JournalACS Applied Materials and Interfaces
Volume3
Issue number4
DOIs
StatePublished - Apr 27 2011
Externally publishedYes

Funding

FundersFunder number
National Science Foundation
Directorate for Engineering0954656

    Keywords

    • UNCD films
    • electrochemically deposited semiconductors
    • electrode patterning
    • metamaterials
    • nontraditional lithography
    • patterned nanowires

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