Abstract
Uncooled pyroelectric infrared based on semiconducting YBa 2Cu3O6+x (YBCO) thin films have been investigated. YBCO precursor solutions were prepared by sol-gel method and YBCO films were fabricated by the spin coating method and structural and electrical properties with variation of annealing temperature were studied. As a result of the differential thermal analysis and thermogravimetry (DTA-TG) analysis, endothermic peak was observed at around750°C due to the formation of the tetragonal phase. The crystal structure of the YBCO film annealed at 750°C was polycrystalline tetragonal phase. The thickness of all the films was approximately 0.26 ∼ 0.31 μm and average grain size of the YBCO film sintered at750°C was about 60 nm. Temperature resistance coefficient (TCR), responsivity and detectivity of the YBCO film sintered at750°C were 3.7%/K at room temperature, 14.47 V/W and 7.23 × 106 cm Hz 1/2/W, respectively.
| Original language | English |
|---|---|
| Pages (from-to) | 52-60 |
| Number of pages | 9 |
| Journal | Integrated Ferroelectrics |
| Volume | 142 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2013 |
| Event | International Symposium on Integrated Functionalities, ISIF 2012 - Hong Kong, Hong Kong Duration: Jun 18 2012 → Jun 21 2012 |
Funding
This work was supported by the Korea Research Foundation (KRF) grant funded by the Korea government (MEST). (No. 03-2011-0223).
Keywords
- Semiconducting YBCO
- Sol-gel
- Thin film