Electrical properties of ScN thin films controlled by defect engineering using oxygen ion implantation

  • Charlotte Poterie
  • , Hugo Bouteiller
  • , Razvan Burcea
  • , Sylvain Dubois
  • , Per Eklund
  • , Arnaud Le Febvrier
  • , Thierry Cabioc’h
  • , Jean François Barbot

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

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Material Science