Electrical properties of (Ba, Sr)TiO3 thin films prepared by liquid delivery MOCVD

Won Jae Lee; R. R. Woolcott; C. Basceri; Hee Young Lee; S. K. Streiffer; A. I. Kingon; Doo Young Yang

Electrical properties of (Ba, Sr)TiO₃ thin films prepared by liquid delivery MOCVD

Won Jae Lee, R. R. Woolcott, C. Basceri, Hee Young Lee, S. K. Streiffer, A. I. Kingon, Doo Young Yang

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The electrical properties and surface morphologies of (Ba, Sr)TiO₃ thin films, with various bottom electrode structures, deposited by liquid-delivery metal organic chemical vapor deposition were investigated. Ir and Ru films as a bottom electrode were prepared onto SiO₂ and polySi substrate structures using ion beam sputtering technique. Since the preparation conditions of the top electrode influence on the electrical properties of dielectric films, process conditions for Pt top electrode were optimized before the electrical measurement. It is observed that the annealing of top electrode improve the leakage current of BST films and the electrical properties of BST films deposited by liquid delivery MOCVD was changed with the deposition temperatures of Ir and Ru as well as substrate structures. Furthermore, it is revealed that these variations in leakage current could be strongly related with the roughness of BST films.

Original language	English
Pages (from-to)	S1652-S1656
Journal	Journal of the Korean Physical Society
Volume	32
Issue number	4 SUPPL.
State	Published - 1998
Externally published	Yes

Cite this

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title = "Electrical properties of (Ba, Sr)TiO3 thin films prepared by liquid delivery MOCVD",

abstract = "The electrical properties and surface morphologies of (Ba, Sr)TiO3 thin films, with various bottom electrode structures, deposited by liquid-delivery metal organic chemical vapor deposition were investigated. Ir and Ru films as a bottom electrode were prepared onto SiO2 and polySi substrate structures using ion beam sputtering technique. Since the preparation conditions of the top electrode influence on the electrical properties of dielectric films, process conditions for Pt top electrode were optimized before the electrical measurement. It is observed that the annealing of top electrode improve the leakage current of BST films and the electrical properties of BST films deposited by liquid delivery MOCVD was changed with the deposition temperatures of Ir and Ru as well as substrate structures. Furthermore, it is revealed that these variations in leakage current could be strongly related with the roughness of BST films.",

author = "Lee, {Won Jae} and Woolcott, {R. R.} and C. Basceri and Lee, {Hee Young} and Streiffer, {S. K.} and Kingon, {A. I.} and Yang, {Doo Young}",

year = "1998",

language = "English",

volume = "32",

pages = "S1652--S1656",

journal = "Journal of the Korean Physical Society",

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TY - JOUR

T1 - Electrical properties of (Ba, Sr)TiO3 thin films prepared by liquid delivery MOCVD

AU - Lee, Won Jae

AU - Woolcott, R. R.

AU - Basceri, C.

AU - Lee, Hee Young

AU - Streiffer, S. K.

AU - Kingon, A. I.

AU - Yang, Doo Young

PY - 1998

Y1 - 1998

N2 - The electrical properties and surface morphologies of (Ba, Sr)TiO3 thin films, with various bottom electrode structures, deposited by liquid-delivery metal organic chemical vapor deposition were investigated. Ir and Ru films as a bottom electrode were prepared onto SiO2 and polySi substrate structures using ion beam sputtering technique. Since the preparation conditions of the top electrode influence on the electrical properties of dielectric films, process conditions for Pt top electrode were optimized before the electrical measurement. It is observed that the annealing of top electrode improve the leakage current of BST films and the electrical properties of BST films deposited by liquid delivery MOCVD was changed with the deposition temperatures of Ir and Ru as well as substrate structures. Furthermore, it is revealed that these variations in leakage current could be strongly related with the roughness of BST films.

AB - The electrical properties and surface morphologies of (Ba, Sr)TiO3 thin films, with various bottom electrode structures, deposited by liquid-delivery metal organic chemical vapor deposition were investigated. Ir and Ru films as a bottom electrode were prepared onto SiO2 and polySi substrate structures using ion beam sputtering technique. Since the preparation conditions of the top electrode influence on the electrical properties of dielectric films, process conditions for Pt top electrode were optimized before the electrical measurement. It is observed that the annealing of top electrode improve the leakage current of BST films and the electrical properties of BST films deposited by liquid delivery MOCVD was changed with the deposition temperatures of Ir and Ru as well as substrate structures. Furthermore, it is revealed that these variations in leakage current could be strongly related with the roughness of BST films.

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M3 - Article

AN - SCOPUS:0032392172

SN - 0374-4884

VL - 32

SP - S1652-S1656

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

IS - 4 SUPPL.

ER -

Electrical properties of (Ba, Sr)TiO₃ thin films prepared by liquid delivery MOCVD

Abstract

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