Electrical conductivity of TaOx as function of composition and temperature

Kefei Bao; Jingjia Meng; Jonathan D. Poplawsky; M. Skowronski

doi:10.1016/j.jnoncrysol.2023.122495

Electrical conductivity of TaO_x as function of composition and temperature

Kefei Bao, Jingjia Meng, Jonathan D. Poplawsky, M. Skowronski

Materials MicroAnalysis

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

The ability to model the resistive switching devices depends on input material parameters and is particularly sensitive to values of electrical conductivity of the functional material as a function of composition and temperature. Here we report the results of conductivity measurements of TaO_x with 0<x<2.36 and a temperature range of 293-800 K performed using Transmission Line Method structures with integrated on-chip heaters. The conductivity exhibits the thermally activated behavior throughout the composition and temperature range with the activation energy (E_AC) changing from 0.34 eV at x=2.36 to 0.016 eV at x=1.

Original language	English
Article number	122495
Journal	Journal of Non-Crystalline Solids
Volume	617
DOIs	https://doi.org/10.1016/j.jnoncrysol.2023.122495
State	Published - Oct 1 2023

Funding

This work was supported by the National Science Foundation (NSF) under Grant No. DMR-2208488 . APT research was supported by the Center for Nanophase Materials Sciences (CNMS), which is a US Department of Energy, Office of Science User Facility at Oak Ridge National Laboratory. The authors would like to thank James Burns for assistance in performing APT sample preparation and running the APT experiments. This manuscript has been authored by UT-Battelle, LLC under Contract No. DE-AC05-00OR22725 with the U.S. Department of Energy. The United States Government retains and the publisher, by accepting the article for publication, acknowledges that the United States Government retains a non-exclusive, paid-up, irrevocable, world-wide license to publish or reproduce the published form of this manuscript, or allow others to do so, for United States Government purposes. The Department of Energy will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan ( http://energy.gov/downloads/doe-public-access-plan) .

Funders	Funder number
Center for Nanophase Materials Sciences
National Science Foundation	DMR-2208488
U.S. Department of Energy
Office of Science
Oak Ridge National Laboratory

Keywords

Activation energies
Electrical conductivity
Resistive switching
Stoichiometry

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1016/j.jnoncrysol.2023.122495

Cite this

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title = "Electrical conductivity of TaOx as function of composition and temperature",

abstract = "The ability to model the resistive switching devices depends on input material parameters and is particularly sensitive to values of electrical conductivity of the functional material as a function of composition and temperature. Here we report the results of conductivity measurements of TaOx with 0AC) changing from 0.34 eV at x=2.36 to 0.016 eV at x=1.",

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