@inproceedings{bcd5f50769564939a62058d122ba6d54,
title = "Electrical and optical properties of Al-doped ZnO films for organic light emitting devices with processing parameters",
abstract = "Al-doped Zinc Oxide (AZO) films is one of the most attractive materials for the transparent conducting oxide. In this study, The electrical and optical properties of Al-doped ZnO films were examined. The films were grown on glass substrates at RT and 300°C with various working pressures by using RF-magnetron sputtering. The crystal orientation, grain size, the surface roughness, and the sheet resistance of AZO films were changed with substrate temperature and working pressure. The (002) peak and (103) peak were preferentially oriented at RT and 300°C, respectively. The grain size and surface roughness increased with increasing working pressure. Electrical properties of the AZO films improved with increasing substrate temperature and working pressure. And optical properties of all AZO films indicated high transmittance regardless of processing conditions.",
keywords = "AZO (Al-doped ZnO), Flat panel display, RF-sputtering, Transparent conducting oxide",
author = "Hong, {Youn Jeong} and Kim, {Hye Jin} and Lee, {Kyu Mann} and Kim, {Sang Ho} and Kim, {Yeong Cheol} and Kim, {Chang Jung} and Kim, {In Woo}",
year = "2007",
language = "English",
isbn = "9787561752289",
series = "AD'07 - Proceedings of Asia Display 2007",
pages = "1483--1488",
booktitle = "AD'07 - Proceedings of Asia Display 2007",
note = "Asia Display 2007, AD'07 ; Conference date: 12-03-2007 Through 16-03-2007",
}