Elasticity and adhesion of thin films by a mechanical resonance method

F. A. List; R. A. McKee

doi:10.1016/0040-6090(87)90004-6

Elasticity and adhesion of thin films by a mechanical resonance method

F. A. List, R. A. McKee

Deposition Science and Technology

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

We describe a simple experimental apparatus capable of simultaneous measurements of elastic and anelastic properties of film/substrate composites in controlled atmospheres (10^-6-10⁴ Pa) from 25 to 1000°C. The apparatus employs the technique of dynamic resonance in which the mechanical response of a material can be determined over a wide range of frequency (0.1-100 kHz) with a resolution of ±1 μHz. We present experimental results for thin films (approximately 100 nm) of nickel and gold on sapphire substrates. These results demonstrate the sensitivity of the apparatus to both the adhesion and the elasticity of the supported film.

Original language	English
Pages (from-to)	17-25
Number of pages	9
Journal	Thin Solid Films
Volume	151
Issue number	1
DOIs	https://doi.org/10.1016/0040-6090(87)90004-6
State	Published - Jul 20 1987

Funding

This research was supported in part (F.A.L.) by an appointment to the U.S. Department of Energy Postgraduate Research Training program administered by Oak Ridge Associated Universities.

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10.1016/0040-6090(87)90004-6

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abstract = "We describe a simple experimental apparatus capable of simultaneous measurements of elastic and anelastic properties of film/substrate composites in controlled atmospheres (10-6-104 Pa) from 25 to 1000°C. The apparatus employs the technique of dynamic resonance in which the mechanical response of a material can be determined over a wide range of frequency (0.1-100 kHz) with a resolution of ±1 μHz. We present experimental results for thin films (approximately 100 nm) of nickel and gold on sapphire substrates. These results demonstrate the sensitivity of the apparatus to both the adhesion and the elasticity of the supported film.",

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AB - We describe a simple experimental apparatus capable of simultaneous measurements of elastic and anelastic properties of film/substrate composites in controlled atmospheres (10-6-104 Pa) from 25 to 1000°C. The apparatus employs the technique of dynamic resonance in which the mechanical response of a material can be determined over a wide range of frequency (0.1-100 kHz) with a resolution of ±1 μHz. We present experimental results for thin films (approximately 100 nm) of nickel and gold on sapphire substrates. These results demonstrate the sensitivity of the apparatus to both the adhesion and the elasticity of the supported film.

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Elasticity and adhesion of thin films by a mechanical resonance method

Abstract

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