Abstract
This study investigates the effectiveness of chemical etchants to remove surface damage caused by mechanical polishing during the fabrication of Cd 0.9Zn0.1.Te (CZT) nuclear radiation detectors. We evaluate different planar CZT devices fabricated from the same CZT crystals. All detectors used electroless Au for the metal contacts. Different polishing particle sizes ranging from 22.1-μm SiC to 0.05-μm alumina were used, which caused different degrees of surface roughness. Current-voltage measurements and detector testing were used to characterize the effects of surface roughness and etching on the material and detector properties.
Original language | English |
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Pages (from-to) | 306-313 |
Number of pages | 8 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 5198 |
DOIs | |
State | Published - 2004 |
Externally published | Yes |
Event | Hard X-Ray and Gamma-Ray Detector Physics V - San Diego, CA, United States Duration: Aug 4 2003 → Aug 5 2003 |