@inproceedings{eac11d89814d49f8be0b8784affe9fed,
title = "Effects of surface electric field on SnO 2 room temperature gas sensors fabricated on nanospike substrates",
abstract = "SnO 2 thin film room-temperature gas sensors have been fabricated on silicon nanospike surfaces prepared by femtosecond pulsed laser irradiation. The surface morphologies of the as-fabricated silicon nanospikes and SnO 2 thin film gas sensors indicate that the surface roughness increased significantly after the SnO 2 layer was deposited. The surface morphology and electric field distribution of the silicon nanospikes were studied with atomic force microscopy (AFM) and the electric force microscopy (EFM), respectively. The comparison between AFM morphology and EFM images shows that the aspect ratio of the nanostructures in the EFM image was larger than that in the AFM image, which indicates that the nanospikes on the silicon surface can induce an enhanced electric field around their sharp features. The electric field around the tips is further enhanced when there is electric current flowing through the SnO 2 layer. The enhanced electric field and increased surface area on the nanospike structures are the main contributors to the high sensitivity of these room temperature gas sensors.",
keywords = "Electric force microscopy, Gas sensor, Nanospikes, SnO, Surface electric field enhancement",
author = "Haizhou Ren and Pengtao Wang and Haibin Huo and Mengyan Shen and Marina Ruths and Hongwei Sun",
year = "2012",
doi = "10.1117/12.915141",
language = "English",
isbn = "9780819490025",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2012",
note = "Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2012 ; Conference date: 12-03-2012 Through 15-03-2012",
}