Effects of oxygen partial pressure on the nucleation behavior and morphology of chemically-vapor-deposited zirconia on Hi-Nicalon fiber and Si

Jinil Lee; Hao Li; Woo Y. Lee; Michael J. Lance

doi:10.1111/j.1151-2916.2003.tb03604.x

Effects of oxygen partial pressure on the nucleation behavior and morphology of chemically-vapor-deposited zirconia on Hi-Nicalon fiber and Si

Jinil Lee
, Hao Li
, Woo Y. Lee
, Michael J. Lance

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

A ZrO₂ coating was prepared on Hi-Nicalon fiber and single-crystal Si by chemical vapor deposition (CVD) using ZrCl₄, CO₂, and H₂ as precursors at 1050°C. The effects of oxygen partial pressure on the nucleation behavior of the CVD-ZrO₂ coating were systematically studied by intentionally varying the controlled amount of O₂ into the CVD chamber. Characterization results suggested that the number density of tetragonal ZrO₂ nuclei apparently decreased with increasing the oxygen partial pressure from 4 × 10^-3 to 1.6 Pa. Also, the coating layer became more columnar and contained larger monoclinic ZrO₂ grains. The observed relationships between the oxygen partial pressure and the nucleation and morphologic characteristics of the ZrO₂ coating were attributed to the grain size and oxygen deficiency effects, which have been previously reported to cause the stabilization of the tetragonal ZrO₂ phase in bulk ZrO₂ specimens.

Original language	English
Pages (from-to)	2031-2036
Number of pages	6
Journal	Journal of the American Ceramic Society
Volume	86
Issue number	12
DOIs	https://doi.org/10.1111/j.1151-2916.2003.tb03604.x
State	Published - Dec 2003

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title = "Effects of oxygen partial pressure on the nucleation behavior and morphology of chemically-vapor-deposited zirconia on Hi-Nicalon fiber and Si",

abstract = "A ZrO2 coating was prepared on Hi-Nicalon fiber and single-crystal Si by chemical vapor deposition (CVD) using ZrCl4, CO2, and H2 as precursors at 1050°C. The effects of oxygen partial pressure on the nucleation behavior of the CVD-ZrO2 coating were systematically studied by intentionally varying the controlled amount of O2 into the CVD chamber. Characterization results suggested that the number density of tetragonal ZrO2 nuclei apparently decreased with increasing the oxygen partial pressure from 4 × 10-3 to 1.6 Pa. Also, the coating layer became more columnar and contained larger monoclinic ZrO2 grains. The observed relationships between the oxygen partial pressure and the nucleation and morphologic characteristics of the ZrO2 coating were attributed to the grain size and oxygen deficiency effects, which have been previously reported to cause the stabilization of the tetragonal ZrO2 phase in bulk ZrO2 specimens.",

author = "Jinil Lee and Hao Li and Lee, \{Woo Y.\} and Lance, \{Michael J.\}",

year = "2003",

month = dec,

doi = "10.1111/j.1151-2916.2003.tb03604.x",

language = "English",

volume = "86",

pages = "2031--2036",

journal = "Journal of the American Ceramic Society",

issn = "0002-7820",

publisher = "wiley",

number = "12",

}

TY - JOUR

T1 - Effects of oxygen partial pressure on the nucleation behavior and morphology of chemically-vapor-deposited zirconia on Hi-Nicalon fiber and Si

AU - Lee, Jinil

AU - Li, Hao

AU - Lee, Woo Y.

AU - Lance, Michael J.

PY - 2003/12

Y1 - 2003/12

N2 - A ZrO2 coating was prepared on Hi-Nicalon fiber and single-crystal Si by chemical vapor deposition (CVD) using ZrCl4, CO2, and H2 as precursors at 1050°C. The effects of oxygen partial pressure on the nucleation behavior of the CVD-ZrO2 coating were systematically studied by intentionally varying the controlled amount of O2 into the CVD chamber. Characterization results suggested that the number density of tetragonal ZrO2 nuclei apparently decreased with increasing the oxygen partial pressure from 4 × 10-3 to 1.6 Pa. Also, the coating layer became more columnar and contained larger monoclinic ZrO2 grains. The observed relationships between the oxygen partial pressure and the nucleation and morphologic characteristics of the ZrO2 coating were attributed to the grain size and oxygen deficiency effects, which have been previously reported to cause the stabilization of the tetragonal ZrO2 phase in bulk ZrO2 specimens.

AB - A ZrO2 coating was prepared on Hi-Nicalon fiber and single-crystal Si by chemical vapor deposition (CVD) using ZrCl4, CO2, and H2 as precursors at 1050°C. The effects of oxygen partial pressure on the nucleation behavior of the CVD-ZrO2 coating were systematically studied by intentionally varying the controlled amount of O2 into the CVD chamber. Characterization results suggested that the number density of tetragonal ZrO2 nuclei apparently decreased with increasing the oxygen partial pressure from 4 × 10-3 to 1.6 Pa. Also, the coating layer became more columnar and contained larger monoclinic ZrO2 grains. The observed relationships between the oxygen partial pressure and the nucleation and morphologic characteristics of the ZrO2 coating were attributed to the grain size and oxygen deficiency effects, which have been previously reported to cause the stabilization of the tetragonal ZrO2 phase in bulk ZrO2 specimens.

UR - https://www.scopus.com/pages/publications/0346936229

U2 - 10.1111/j.1151-2916.2003.tb03604.x

DO - 10.1111/j.1151-2916.2003.tb03604.x

M3 - Article

AN - SCOPUS:0346936229

SN - 0002-7820

VL - 86

SP - 2031

EP - 2036

JO - Journal of the American Ceramic Society

JF - Journal of the American Ceramic Society

IS - 12

ER -

Effects of oxygen partial pressure on the nucleation behavior and morphology of chemically-vapor-deposited zirconia on Hi-Nicalon fiber and Si

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