Effect of surface/interface energy and stress on the ferroelectric properties

Min Hyuk Park, Tony Schenk, Sergej Starschich, Chris M. Fancher, Han Joon Kim, Ulrich Böttger, Cheol Seong Hwang, Akira Toriumi, Xuan Tian, Uwe Schroeder

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

6 Scopus citations

Abstract

The ferroelectricity in fluorite-structure type oxide thin films can be attributed to the stabilization of a noncentrosymmetric orthorhombic phase (space group: Pca21), which is a nonequilibrium phase of bulk HfO2 or ZrO2. Various mechanisms, including surface or interface/grain boundary energy and film stress, have been suggested to stabilize the metastable ferroelectric phase, and kinetic mechanisms have been shown to inhibit the formation of the stable monoclinic phase. Film thickness has been demonstrated to be a critical factor that strongly influences the structure and ferroelectric response of films. Although the film thickness is a key factor for the formation of the ferroelectric phase in fluorite-structure type thin films, details of it have not been clearly elucidated yet. In this chapter, the existing literature on the thickness-dependent ferroelectricity in fluorite-type oxides is comprehensively reviewed, and the previous studies to mitigate the thickness effects are discussed.

Original languageEnglish
Title of host publicationFerroelectricity in Doped Hafnium Oxide
Subtitle of host publicationMaterials, Properties and Devices
PublisherElsevier
Pages145-172
Number of pages28
ISBN (Electronic)9780081024300
ISBN (Print)9780081024317
DOIs
StatePublished - Jan 1 2019

Bibliographical note

Publisher Copyright:
© 2019 Elsevier Ltd. All rights reserved.

Keywords

  • Atomic layer deposition
  • Chemical solution deposition
  • Ferroelectricity
  • Hafnium-zirconium oxide
  • Physical vapor deposition
  • Process condition

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