Effect of sputtering gas on the surface composition of an Al-Pd-Mn quasicrystal

Cynthia J. Jenks; Joseph W. Burnett; Drew W. Delaney; Thomas A. Lograsso; Patricia A. Thiel

doi:10.1016/S0169-4332(99)00526-7

Effect of sputtering gas on the surface composition of an Al-Pd-Mn quasicrystal

Cynthia J. Jenks, Joseph W. Burnett, Drew W. Delaney, Thomas A. Lograsso, Patricia A. Thiel

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

We demonstrate the effects of different inert sputtering gases on the surface composition of icosahedral (i-) Al-Pd-Mn. The sputtering gases used include He, Ne, Ar, Xe, and Kr. We demonstrate that the steady-state composition is independent of the inert gas chosen. This steady-state composition falls outside of the quasicrystalline region of the Al-Pd-Mn phase diagram. However, the fluence (ions/cm²) to achieve steady-state depends on the inert gas. Helium requires a much higher fluence than the other gases. Because of this, He can be used to clean the surface, if the time (fluence) for sputtering is kept to a minimum, without causing the large compositional shift induced with a relatively small fluence by the most common sputtering gas, Ar.

Original language	English
Pages (from-to)	23-28
Number of pages	6
Journal	Applied Surface Science
Volume	157
Issue number	1
DOIs	https://doi.org/10.1016/S0169-4332(99)00526-7
State	Published - Mar 2000
Externally published	Yes

Funding

This work was supported by the Director, Office of Energy Research, Office of Basic Energy Sciences, Materials Sciences Division, of the U.S. Department of Energy under Contract No.W-405-Eng-82.

Funders	Funder number
Office of Basic Energy Sciences
Office of Energy Research
U.S. Department of Energy
Division of Materials Sciences and Engineering

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10.1016/S0169-4332(99)00526-7

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@article{d41d2ccebac048b5bb11aaa34fa2fedf,

title = "Effect of sputtering gas on the surface composition of an Al-Pd-Mn quasicrystal",

abstract = "We demonstrate the effects of different inert sputtering gases on the surface composition of icosahedral (i-) Al-Pd-Mn. The sputtering gases used include He, Ne, Ar, Xe, and Kr. We demonstrate that the steady-state composition is independent of the inert gas chosen. This steady-state composition falls outside of the quasicrystalline region of the Al-Pd-Mn phase diagram. However, the fluence (ions/cm2) to achieve steady-state depends on the inert gas. Helium requires a much higher fluence than the other gases. Because of this, He can be used to clean the surface, if the time (fluence) for sputtering is kept to a minimum, without causing the large compositional shift induced with a relatively small fluence by the most common sputtering gas, Ar.",

author = "Jenks, {Cynthia J.} and Burnett, {Joseph W.} and Delaney, {Drew W.} and Lograsso, {Thomas A.} and Thiel, {Patricia A.}",

year = "2000",

month = mar,

doi = "10.1016/S0169-4332(99)00526-7",

language = "English",

volume = "157",

pages = "23--28",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - Effect of sputtering gas on the surface composition of an Al-Pd-Mn quasicrystal

AU - Jenks, Cynthia J.

AU - Burnett, Joseph W.

AU - Delaney, Drew W.

AU - Lograsso, Thomas A.

AU - Thiel, Patricia A.

PY - 2000/3

Y1 - 2000/3

N2 - We demonstrate the effects of different inert sputtering gases on the surface composition of icosahedral (i-) Al-Pd-Mn. The sputtering gases used include He, Ne, Ar, Xe, and Kr. We demonstrate that the steady-state composition is independent of the inert gas chosen. This steady-state composition falls outside of the quasicrystalline region of the Al-Pd-Mn phase diagram. However, the fluence (ions/cm2) to achieve steady-state depends on the inert gas. Helium requires a much higher fluence than the other gases. Because of this, He can be used to clean the surface, if the time (fluence) for sputtering is kept to a minimum, without causing the large compositional shift induced with a relatively small fluence by the most common sputtering gas, Ar.

AB - We demonstrate the effects of different inert sputtering gases on the surface composition of icosahedral (i-) Al-Pd-Mn. The sputtering gases used include He, Ne, Ar, Xe, and Kr. We demonstrate that the steady-state composition is independent of the inert gas chosen. This steady-state composition falls outside of the quasicrystalline region of the Al-Pd-Mn phase diagram. However, the fluence (ions/cm2) to achieve steady-state depends on the inert gas. Helium requires a much higher fluence than the other gases. Because of this, He can be used to clean the surface, if the time (fluence) for sputtering is kept to a minimum, without causing the large compositional shift induced with a relatively small fluence by the most common sputtering gas, Ar.

UR - http://www.scopus.com/inward/record.url?scp=0033880194&partnerID=8YFLogxK

U2 - 10.1016/S0169-4332(99)00526-7

DO - 10.1016/S0169-4332(99)00526-7

M3 - Article

AN - SCOPUS:0033880194

SN - 0169-4332

VL - 157

SP - 23

EP - 28

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1

ER -

Effect of sputtering gas on the surface composition of an Al-Pd-Mn quasicrystal

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