Abstract
Current and voltage characteristics of MEFISFETs using different insulators show that CeO2 or Y2O3 insulator performs excellent role to prevent the reduction of coercive field in the SrBi2Ta2O9 (SBT) film and the interaction between the SBT and Si. The memory window of the MEFISFET using CeO2 or Y2O3 insulator is about 1.25 V at the gate voltage of 5 V, and its drain current level (write/read state) is 10-4 A. Whereas, the memory window of the MEFISFET using SiO2 is 0.25 V at the same gate voltage and the drain current level is only 10-6 A.
Original language | English |
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Pages | 35-38 |
Number of pages | 4 |
State | Published - 1998 |
Externally published | Yes |
Event | Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) - Montreaux, Switz Duration: Aug 24 1998 → Aug 27 1998 |
Conference
Conference | Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) |
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City | Montreaux, Switz |
Period | 08/24/98 → 08/27/98 |