Effect of buffer oxide etchant (BOE) on Ti/Al/Ni/Au ohmic contacts for AlGaN/GaN based HEMT

Ya Hsi Hwang, Shihyun Ahn, Chen Dong, Weidi Zhu, Byung Jae Kim, Fan Ren, Aaron G. Lind, Kevin S. Jones, Stephen J. Pearton, Ivan I. Kravchenko

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

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Chemical Engineering