Effect of buffer oxide etchant (BOE) on Ti/Al/Ni/Au ohmic contacts for AlGaN/GaN based HEMT

  • Ya Hsi Hwang
  • , Shihyun Ahn
  • , Chen Dong
  • , Weidi Zhu
  • , Byung Jae Kim
  • , Fan Ren
  • , Aaron G. Lind
  • , Kevin S. Jones
  • , Stephen J. Pearton
  • , Ivan I. Kravchenko

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

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