TY - JOUR
T1 - Directing Matter
T2 - Toward Atomic-Scale 3D Nanofabrication
AU - Jesse, Stephen
AU - Borisevich, Albina Y.
AU - Fowlkes, Jason D.
AU - Lupini, Andrew R.
AU - Rack, Philip D.
AU - Unocic, Raymond R.
AU - Sumpter, Bobby G.
AU - Kalinin, Sergei V.
AU - Belianinov, Alex
AU - Ovchinnikova, Olga S.
N1 - Publisher Copyright:
© 2016 American Chemical Society.
PY - 2016/6/28
Y1 - 2016/6/28
N2 - Enabling memristive, neuromorphic, and quantum-based computing as well as efficient mainstream energy storage and conversion technologies requires the next generation of materials customized at the atomic scale. This requires full control of atomic arrangement and bonding in three dimensions. The last two decades witnessed substantial industrial, academic, and government research efforts directed toward this goal through various lithographies and scanning-probe-based methods. These technologies emphasize 2D surface structures, with some limited 3D capability. Recently, a range of focused electron- and ion-based methods have demonstrated compelling alternative pathways to achieving atomically precise manufacturing of 3D structures in solids, liquids, and at interfaces. Electron and ion microscopies offer a platform that can simultaneously observe dynamic and static structures at the nano- and atomic scales and also induce structural rearrangements and chemical transformation. The addition of predictive modeling or rapid image analytics and feedback enables guiding these in a controlled manner. Here, we review the recent results that used focused electron and ion beams to create free-standing nanoscale 3D structures, radiolysis, and the fabrication potential with liquid precursors, epitaxial crystallization of amorphous oxides with atomic layer precision, as well as visualization and control of individual dopant motion within a 3D crystal lattice. These works lay the foundation for approaches to directing nanoscale level architectures and offer a potential roadmap to full 3D atomic control in materials. In this paper, we lay out the gaps that currently constrain the processing range of these platforms, reflect on indirect requirements, such as the integration of large-scale data analysis with theory, and discuss future prospects of these technologies.
AB - Enabling memristive, neuromorphic, and quantum-based computing as well as efficient mainstream energy storage and conversion technologies requires the next generation of materials customized at the atomic scale. This requires full control of atomic arrangement and bonding in three dimensions. The last two decades witnessed substantial industrial, academic, and government research efforts directed toward this goal through various lithographies and scanning-probe-based methods. These technologies emphasize 2D surface structures, with some limited 3D capability. Recently, a range of focused electron- and ion-based methods have demonstrated compelling alternative pathways to achieving atomically precise manufacturing of 3D structures in solids, liquids, and at interfaces. Electron and ion microscopies offer a platform that can simultaneously observe dynamic and static structures at the nano- and atomic scales and also induce structural rearrangements and chemical transformation. The addition of predictive modeling or rapid image analytics and feedback enables guiding these in a controlled manner. Here, we review the recent results that used focused electron and ion beams to create free-standing nanoscale 3D structures, radiolysis, and the fabrication potential with liquid precursors, epitaxial crystallization of amorphous oxides with atomic layer precision, as well as visualization and control of individual dopant motion within a 3D crystal lattice. These works lay the foundation for approaches to directing nanoscale level architectures and offer a potential roadmap to full 3D atomic control in materials. In this paper, we lay out the gaps that currently constrain the processing range of these platforms, reflect on indirect requirements, such as the integration of large-scale data analysis with theory, and discuss future prospects of these technologies.
KW - atom dynamics
KW - atomic manipulation
KW - direct-write
KW - helium ion microscopy
KW - nanofabrication
KW - nanolithography
KW - scanning electron microscopy
KW - scanning transmission electron microscopy
UR - http://www.scopus.com/inward/record.url?scp=84976554971&partnerID=8YFLogxK
U2 - 10.1021/acsnano.6b02489
DO - 10.1021/acsnano.6b02489
M3 - Review article
AN - SCOPUS:84976554971
SN - 1936-0851
VL - 10
SP - 5600
EP - 5618
JO - ACS Nano
JF - ACS Nano
IS - 6
ER -