Direct-write femtosecond laser ablation and DNA combing and imprinting for fabrication of a micro/nanofluidic device on an ethylene glycol dimethacrylate polymer

Y. C. Lim, P. E. Boukany, D. F. Farson, L. J. Lee

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

Arrays of microwells connected by nanoscale channels with sizes on the order of 10 nm can be created in an ethylene glycol dimethacrylate (EGMDA) polymer using the DNA combing and imprinting technique. Larger micro-scale channels which lead into the microwell/nanochannel arrays are needed to allow the arrays to be externally filled with desired reagents, molecules and cells. In this work, direct-write femtosecond laser ablation was employed as a post process to fabricate these microscale filling channels. Single pulse and multiple pulses overlap ablation was first conducted on an EGMDA polymer using a focused femtosecond laser beam. Scanning electron microscopy was employed to measure the ablated channel width. Single pulse ablation threshold fluence and incubation coefficient were found and were used to predict microchannel width. Finally, femtosecond laser ablation was used to fabricate filling channels on microwell/nanochannel arrays. Fluorescent flow testing was performed to verify fluid connectivity between the laser-ablated filling channels and the microwell/nanochannel array.

Original languageEnglish
Article number015012
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number1
DOIs
StatePublished - Jan 2011
Externally publishedYes

Fingerprint

Dive into the research topics of 'Direct-write femtosecond laser ablation and DNA combing and imprinting for fabrication of a micro/nanofluidic device on an ethylene glycol dimethacrylate polymer'. Together they form a unique fingerprint.

Cite this