@article{2b4d62beafd94e26947b5161d11a132d,
title = "Direct to digital holography for semiconductor wafer defect detection and review",
abstract = "A method for recording true holograms (not holographic interferometry) directly to a digital video medium in a single image has been invented. This technology makes the amplitude and phase for every pixel of the target object wave available. Since phase is proportional to wavelength, this makes high-resolution metrology an implicit part of the holographic recording. Measurements of phase can be made to one hundredth or even one thousandth of a wavelength, so the technology is attractive for finding defects on semiconductor wafers, where feature sizes are now smaller than the wavelength of even deep ultra-violet light.",
keywords = "Digital holography, High aspect ratio inspection (HARI), Semiconductor metrology, Semiconductor wafer defects",
author = "Thomas, {C. E.} and Bahm, {Tracy M.} and Baylor, {Larry R.} and Bingham, {Philip R.} and Burns, {Steven W.} and Chidley, {Matthew D.} and Xiaolong Dai and Delahanty, {Robert J.} and Doti, {Christopher J.} and Ayman El-Khashab and Fisher, {Robert L.} and Gilbert, {Judd M.} and Goddard, {James S.} and Hanson, {Gregory R.} and Hickson, {Joel D.} and Hunt, {Martin A.} and Hylton, {Kathy W.} and John, {George C.} and Jones, {Michael L.} and MacDonald, {Kenneth R.} and Mayo, {Michael W.} and Ian McMackin and Patek, {David R.} and Price, {John H.} and Rasmussen, {David A.} and Schaefer, {Louis J.} and Scheidt, {Thomas R.} and Schulze, {Mark A.} and Schumaker, {Philip D.} and Bichuan Shen and Smith, {Randall G.} and Su, {Allen N.} and Tobin, {Kenneth W.} and Usry, {William R.} and Edgar Voelkl and Weber, {Karsten S.} and Jones, {Paul G.} and Owen, {Robert W.}",
year = "2002",
doi = "10.1117/12.475659",
language = "English",
volume = "4692",
pages = "180--194",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "Society of Photo-Optical Instrumentation Engineers",
}