Direct solids analysis using sputter initiated resonance ionization spectroscopy (SIRIS)

J. E. Parks; W. M. Fairbank; J. M.R. Hutchinson

doi:10.6028/jres.093.086

Direct solids analysis using sputter initiated resonance ionization spectroscopy (SIRIS)

J. E. Parks, W. M. Fairbank, J. M.R. Hutchinson

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

Sputter Initiated Resonance Ionization Spectroscopy (SIRIS) is a method allowing a minimum of chemical pretreatment, the chief source of contamination, and providing a highly selective and sensitive measurement of essentially any element. SIRIS is an ultra-sensitive analysis technique which uses an energetic ion beam to sputter a solid sample and Resonance Ionization Spectroscopy (RIS) to selectively and efficiently ionize neutral atoms of the element of interest in the atomized cloud. A primary advantage of SIRIS technology is the potential to reduce or eliminate the matrix effect in direct solids analysis by utilizing the predominant neutral population produced by primary ion bombardment. The principal results reported come from using SIRIS to investigate the spatial distribution of trace elements in specially fabricated crystals or devices.

Original language	English
Pages (from-to)	383-385
Number of pages	3
Journal	Journal of research of the National Bureau of Standards
Volume	93
Issue number	3
DOIs	https://doi.org/10.6028/jres.093.086
State	Published - 1988
Externally published	Yes
Event	Accuracy in Trace Analysis: Accomplishments, Goals, Challenges - Gaithersburg, MD, USA Duration: Sep 28 1988 → Oct 1 1988

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title = "Direct solids analysis using sputter initiated resonance ionization spectroscopy (SIRIS)",

abstract = "Sputter Initiated Resonance Ionization Spectroscopy (SIRIS) is a method allowing a minimum of chemical pretreatment, the chief source of contamination, and providing a highly selective and sensitive measurement of essentially any element. SIRIS is an ultra-sensitive analysis technique which uses an energetic ion beam to sputter a solid sample and Resonance Ionization Spectroscopy (RIS) to selectively and efficiently ionize neutral atoms of the element of interest in the atomized cloud. A primary advantage of SIRIS technology is the potential to reduce or eliminate the matrix effect in direct solids analysis by utilizing the predominant neutral population produced by primary ion bombardment. The principal results reported come from using SIRIS to investigate the spatial distribution of trace elements in specially fabricated crystals or devices.",

author = "Parks, {J. E.} and Fairbank, {W. M.} and Hutchinson, {J. M.R.}",

year = "1988",

doi = "10.6028/jres.093.086",

language = "English",

volume = "93",

pages = "383--385",

journal = "Journal of research of the National Bureau of Standards",

issn = "0160-1741",

number = "3",

note = "Accuracy in Trace Analysis: Accomplishments, Goals, Challenges ; Conference date: 28-09-1988 Through 01-10-1988",

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TY - JOUR

T1 - Direct solids analysis using sputter initiated resonance ionization spectroscopy (SIRIS)

AU - Parks, J. E.

AU - Fairbank, W. M.

AU - Hutchinson, J. M.R.

PY - 1988

Y1 - 1988

N2 - Sputter Initiated Resonance Ionization Spectroscopy (SIRIS) is a method allowing a minimum of chemical pretreatment, the chief source of contamination, and providing a highly selective and sensitive measurement of essentially any element. SIRIS is an ultra-sensitive analysis technique which uses an energetic ion beam to sputter a solid sample and Resonance Ionization Spectroscopy (RIS) to selectively and efficiently ionize neutral atoms of the element of interest in the atomized cloud. A primary advantage of SIRIS technology is the potential to reduce or eliminate the matrix effect in direct solids analysis by utilizing the predominant neutral population produced by primary ion bombardment. The principal results reported come from using SIRIS to investigate the spatial distribution of trace elements in specially fabricated crystals or devices.

AB - Sputter Initiated Resonance Ionization Spectroscopy (SIRIS) is a method allowing a minimum of chemical pretreatment, the chief source of contamination, and providing a highly selective and sensitive measurement of essentially any element. SIRIS is an ultra-sensitive analysis technique which uses an energetic ion beam to sputter a solid sample and Resonance Ionization Spectroscopy (RIS) to selectively and efficiently ionize neutral atoms of the element of interest in the atomized cloud. A primary advantage of SIRIS technology is the potential to reduce or eliminate the matrix effect in direct solids analysis by utilizing the predominant neutral population produced by primary ion bombardment. The principal results reported come from using SIRIS to investigate the spatial distribution of trace elements in specially fabricated crystals or devices.

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M3 - Conference article

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SN - 0160-1741

VL - 93

SP - 383

EP - 385

JO - Journal of research of the National Bureau of Standards

JF - Journal of research of the National Bureau of Standards

IS - 3

T2 - Accuracy in Trace Analysis: Accomplishments, Goals, Challenges

Y2 - 28 September 1988 through 1 October 1988

ER -

Direct solids analysis using sputter initiated resonance ionization spectroscopy (SIRIS)

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