Direct measurement of grain boundary resistance in copper nanowires

An Ping Li, Tae Hwan Kim, X. G. Zhang, Don M. Nicholson, B. M. Evans, N. S. Kulkarni, E. A. Kenik, H. M. Meyer, B. Radhakrishnan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

As interconnect dimensions decrease, the resistivity of copper increases dramatically because of electron scattering from surfaces, impurities, and grain boundaries (GBs), and threatens to stymie continued device scaling. Here we directly measure individual GB resistances in copper nanowires with a one-to-one correspondence to the GB structure. The resistance of high symmetry coincidence GBs is then calculated using a first-principle method. GB resistance is found to differ by orders of magnitude between different types of GB, with random GBs showing an intrinsically higher resistance compared to coincidence GBs.

Original languageEnglish
Title of host publication2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011
DOIs
StatePublished - 2011
Event2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011 - Dresden, Germany
Duration: May 8 2011May 12 2011

Publication series

Name2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011

Conference

Conference2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011
Country/TerritoryGermany
CityDresden
Period05/8/1105/12/11

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