Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography

S. A. Eliza; S. K. Islam; T. Rahman; R. Vijayaraghavan; T. Grundman; B. Blalock; S. J. Randolph; L. R. Baylor; T. S. Bigelow; W. L. Gardner; M. N. Ericson; J. A. Moore

doi:10.1109/ISDRS.2007.4422425

Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography

S. A. Eliza, S. K. Islam, T. Rahman, R. Vijayaraghavan, T. Grundman, B. Blalock, S. J. Randolph, L. R. Baylor, T. S. Bigelow, W. L. Gardner, M. N. Ericson, J. A. Moore

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Original language	English
Title of host publication	2007 International Semiconductor Device Research Symposium, ISDRS
DOIs	https://doi.org/10.1109/ISDRS.2007.4422425
State	Published - 2007
Event	2007 International Semiconductor Device Research Symposium, ISDRS - College Park, MD, United States Duration: Dec 12 2007 → Dec 14 2007

Publication series

Name	2007 International Semiconductor Device Research Symposium, ISDRS

Conference

Conference	2007 International Semiconductor Device Research Symposium, ISDRS
Country/Territory	United States
City	College Park, MD
Period	12/12/07 → 12/14/07

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10.1109/ISDRS.2007.4422425

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Eliza, S. A., Islam, S. K., Rahman, T., Vijayaraghavan, R., Grundman, T., Blalock, B., Randolph, S. J., Baylor, L. R., Bigelow, T. S., Gardner, W. L., Ericson, M. N., & Moore, J. A. (2007). Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography. In 2007 International Semiconductor Device Research Symposium, ISDRS Article 4422425 (2007 International Semiconductor Device Research Symposium, ISDRS). https://doi.org/10.1109/ISDRS.2007.4422425

@inproceedings{e250895d0c434f909f3d25b96633443c,

title = "Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography",

author = "Eliza, {S. A.} and Islam, {S. K.} and T. Rahman and R. Vijayaraghavan and T. Grundman and B. Blalock and Randolph, {S. J.} and Baylor, {L. R.} and Bigelow, {T. S.} and Gardner, {W. L.} and Ericson, {M. N.} and Moore, {J. A.}",

year = "2007",

doi = "10.1109/ISDRS.2007.4422425",

language = "English",

isbn = "1424418917",

series = "2007 International Semiconductor Device Research Symposium, ISDRS",

booktitle = "2007 International Semiconductor Device Research Symposium, ISDRS",

note = "2007 International Semiconductor Device Research Symposium, ISDRS ; Conference date: 12-12-2007 Through 14-12-2007",

}

Eliza, SA, Islam, SK, Rahman, T, Vijayaraghavan, R, Grundman, T, Blalock, B, Randolph, SJ, Baylor, LR , Bigelow, TS, Gardner, WL, Ericson, MN & Moore, JA 2007, Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography. in 2007 International Semiconductor Device Research Symposium, ISDRS., 4422425, 2007 International Semiconductor Device Research Symposium, ISDRS, 2007 International Semiconductor Device Research Symposium, ISDRS, College Park, MD, United States, 12/12/07. https://doi.org/10.1109/ISDRS.2007.4422425

Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography. / Eliza, S. A.; Islam, S. K.; Rahman, T. et al.
2007 International Semiconductor Device Research Symposium, ISDRS. 2007. 4422425 (2007 International Semiconductor Device Research Symposium, ISDRS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography

AU - Eliza, S. A.

AU - Islam, S. K.

AU - Rahman, T.

AU - Vijayaraghavan, R.

AU - Grundman, T.

AU - Blalock, B.

AU - Randolph, S. J.

AU - Baylor, L. R.

AU - Bigelow, T. S.

AU - Gardner, W. L.

AU - Ericson, M. N.

AU - Moore, J. A.

PY - 2007

Y1 - 2007

UR - http://www.scopus.com/inward/record.url?scp=44949141631&partnerID=8YFLogxK

U2 - 10.1109/ISDRS.2007.4422425

DO - 10.1109/ISDRS.2007.4422425

M3 - Conference contribution

AN - SCOPUS:44949141631

SN - 1424418917

SN - 9781424418916

T3 - 2007 International Semiconductor Device Research Symposium, ISDRS

BT - 2007 International Semiconductor Device Research Symposium, ISDRS

T2 - 2007 International Semiconductor Device Research Symposium, ISDRS

Y2 - 12 December 2007 through 14 December 2007

ER -

Eliza SA, Islam SK, Rahman T, Vijayaraghavan R, Grundman T, Blalock B et al. Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography. In 2007 International Semiconductor Device Research Symposium, ISDRS. 2007. 4422425. (2007 International Semiconductor Device Research Symposium, ISDRS). doi: 10.1109/ISDRS.2007.4422425

Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography

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