Abstract
Ion beam sputtering is a routine method for the preparation of thin films used as targets because it allows the use of a minimum quantity of starting material, and losses are much lower than most other vacuum deposition techniques. Work is underway in the Isotope Research Materials Laboratory (IRML) at ORNL to develop the techniques that will make the preparation of actinide targets up to 100 μg/cm2 by ion beam sputtering a routinely available service from IRML. The preparation of the actinide material in a form suitable for sputtering is a key to this technique, as is designing a sputtering system that allows the flexibility required for custom-ordered target production. At present, development work is being conducted on low-activity actinides in a bench-top system. The system will then be installed in a hood or glove box approved for radioactive materials handling where processing of radium, actinium, and plutonium isotopes among others will be performed.
Original language | English |
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Pages (from-to) | 520-525 |
Number of pages | 6 |
Journal | Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment |
Volume | 236 |
Issue number | 3 |
DOIs | |
State | Published - Jun 1 1985 |
Funding
* Research sponsored by the Division of Basic Energy Sciences and Division of Nuclear Sciences, US Department of En-ergy, under contract DE-AC05-84OR21400 with the Martin Marietta Energy Systems, Inc.
Funders | Funder number |
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Division of Basic Energy Sciences | |
Division of Nuclear Sciences | |
US Department of En-ergy | DE-AC05-84OR21400 |