Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-Å information limit

C. Kisielowski; B. Freitag; M. Bischoff; H. Van Lin; S. Lazar; G. Knippels; P. Tiemeijer; M. Van Der Stam; S. Von Harrach; M. Stekelenburg; M. Haider; S. Uhlemann; H. Müller; P. Hartel; B. Kabius; D. Miller; I. Petrov; E. A. Olson; T. Donchev; E. A. Kenik; A. R. Lupini; J. Bentley; S. J. Pennycook; I. M. Anderson; A. M. Minor; A. K. Schmid; T. Duden; V. Radmilovic; Q. M. Ramasse; M. Watanabe; R. Erni; E. A. Stach; P. Denes; U. Dahmen

doi:10.1017/S1431927608080902

Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-Å information limit

C. Kisielowski, B. Freitag, M. Bischoff, H. Van Lin, S. Lazar, G. Knippels, P. Tiemeijer, M. Van Der Stam, S. Von Harrach, M. Stekelenburg, M. Haider, S. Uhlemann, H. Müller, P. Hartel, B. Kabius, D. Miller, I. Petrov, E. A. Olson, T. Donchev, E. A. KenikA. R. Lupini, J. Bentley, S. J. Pennycook, I. M. Anderson, A. M. Minor, A. K. Schmid, T. Duden, V. Radmilovic, Q. M. Ramasse, M. Watanabe, R. Erni, E. A. Stach, P. Denes, U. Dahmen

electron Microscopy and Microanalysis

Research output: Contribution to journal › Article › peer-review

259 Scopus citations

Abstract

The ability of electron microscopes to analyze all the atoms in individual nanostructures is limited by lens aberrations. However, recent advances in aberration-correcting electron optics have led to greatly enhanced instrument performance and new techniques of electron microscopy. The development of an ultrastable electron microscope with aberration-correcting optics and a monochromated high-brightness source has significantly improved instrument resolution and contrast. In the present work, we report information transfer beyond 50 pm and show images of single gold atoms with a signal-to-noise ratio as large as 10. The instrument's new capabilities were exploited to detect a buried ∑3 {112} grain boundary and observe the dynamic arrangements of single atoms and atom pairs with sub-angstrom resolution. These results mark an important step toward meeting the challenge of determining the three-dimensional atomic-scale structure of nanomaterials.

Original language	English
Pages (from-to)	469-477
Number of pages	9
Journal	Microscopy and Microanalysis
Volume	14
Issue number	5
DOIs	https://doi.org/10.1017/S1431927608080902
State	Published - Oct 2008

Keywords

Aberration-correcting optics
Atomic structure
Buried defect
Sub-angstrom
TEM/STEM

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Kisielowski, C., Freitag, B., Bischoff, M., Van Lin, H., Lazar, S., Knippels, G., Tiemeijer, P., Van Der Stam, M., Von Harrach, S., Stekelenburg, M., Haider, M., Uhlemann, S., Müller, H., Hartel, P., Kabius, B., Miller, D., Petrov, I., Olson, E. A., Donchev, T., ... Dahmen, U. (2008). Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-Å information limit. Microscopy and Microanalysis, 14(5), 469-477. https://doi.org/10.1017/S1431927608080902

@article{b23f27630d5246a4bb6f65e7f1a2e9b2,

title = "Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-{\AA} information limit",

abstract = "The ability of electron microscopes to analyze all the atoms in individual nanostructures is limited by lens aberrations. However, recent advances in aberration-correcting electron optics have led to greatly enhanced instrument performance and new techniques of electron microscopy. The development of an ultrastable electron microscope with aberration-correcting optics and a monochromated high-brightness source has significantly improved instrument resolution and contrast. In the present work, we report information transfer beyond 50 pm and show images of single gold atoms with a signal-to-noise ratio as large as 10. The instrument's new capabilities were exploited to detect a buried ∑3 {112} grain boundary and observe the dynamic arrangements of single atoms and atom pairs with sub-angstrom resolution. These results mark an important step toward meeting the challenge of determining the three-dimensional atomic-scale structure of nanomaterials.",

keywords = "Aberration-correcting optics, Atomic structure, Buried defect, Sub-angstrom, TEM/STEM",

author = "C. Kisielowski and B. Freitag and M. Bischoff and {Van Lin}, H. and S. Lazar and G. Knippels and P. Tiemeijer and {Van Der Stam}, M. and {Von Harrach}, S. and M. Stekelenburg and M. Haider and S. Uhlemann and H. M{\"u}ller and P. Hartel and B. Kabius and D. Miller and I. Petrov and Olson, {E. A.} and T. Donchev and Kenik, {E. A.} and Lupini, {A. R.} and J. Bentley and Pennycook, {S. J.} and Anderson, {I. M.} and Minor, {A. M.} and Schmid, {A. K.} and T. Duden and V. Radmilovic and Ramasse, {Q. M.} and M. Watanabe and R. Erni and Stach, {E. A.} and P. Denes and U. Dahmen",

year = "2008",

month = oct,

doi = "10.1017/S1431927608080902",

language = "English",

volume = "14",

pages = "469--477",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

number = "5",

}

Kisielowski, C, Freitag, B, Bischoff, M, Van Lin, H, Lazar, S, Knippels, G, Tiemeijer, P, Van Der Stam, M, Von Harrach, S, Stekelenburg, M, Haider, M, Uhlemann, S, Müller, H, Hartel, P, Kabius, B, Miller, D, Petrov, I, Olson, EA, Donchev, T, Kenik, EA, Lupini, AR, Bentley, J, Pennycook, SJ, Anderson, IM, Minor, AM, Schmid, AK, Duden, T, Radmilovic, V, Ramasse, QM, Watanabe, M, Erni, R, Stach, EA, Denes, P & Dahmen, U 2008, 'Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-Å information limit', Microscopy and Microanalysis, vol. 14, no. 5, pp. 469-477. https://doi.org/10.1017/S1431927608080902

TY - JOUR

T1 - Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-Å information limit

AU - Kisielowski, C.

AU - Freitag, B.

AU - Bischoff, M.

AU - Van Lin, H.

AU - Lazar, S.

AU - Knippels, G.

AU - Tiemeijer, P.

AU - Van Der Stam, M.

AU - Von Harrach, S.

AU - Stekelenburg, M.

AU - Haider, M.

AU - Uhlemann, S.

AU - Müller, H.

AU - Hartel, P.

AU - Kabius, B.

AU - Miller, D.

AU - Petrov, I.

AU - Olson, E. A.

AU - Donchev, T.

AU - Kenik, E. A.

AU - Lupini, A. R.

AU - Bentley, J.

AU - Pennycook, S. J.

AU - Anderson, I. M.

AU - Minor, A. M.

AU - Schmid, A. K.

AU - Duden, T.

AU - Radmilovic, V.

AU - Ramasse, Q. M.

AU - Watanabe, M.

AU - Erni, R.

AU - Stach, E. A.

AU - Denes, P.

AU - Dahmen, U.

PY - 2008/10

Y1 - 2008/10

N2 - The ability of electron microscopes to analyze all the atoms in individual nanostructures is limited by lens aberrations. However, recent advances in aberration-correcting electron optics have led to greatly enhanced instrument performance and new techniques of electron microscopy. The development of an ultrastable electron microscope with aberration-correcting optics and a monochromated high-brightness source has significantly improved instrument resolution and contrast. In the present work, we report information transfer beyond 50 pm and show images of single gold atoms with a signal-to-noise ratio as large as 10. The instrument's new capabilities were exploited to detect a buried ∑3 {112} grain boundary and observe the dynamic arrangements of single atoms and atom pairs with sub-angstrom resolution. These results mark an important step toward meeting the challenge of determining the three-dimensional atomic-scale structure of nanomaterials.

AB - The ability of electron microscopes to analyze all the atoms in individual nanostructures is limited by lens aberrations. However, recent advances in aberration-correcting electron optics have led to greatly enhanced instrument performance and new techniques of electron microscopy. The development of an ultrastable electron microscope with aberration-correcting optics and a monochromated high-brightness source has significantly improved instrument resolution and contrast. In the present work, we report information transfer beyond 50 pm and show images of single gold atoms with a signal-to-noise ratio as large as 10. The instrument's new capabilities were exploited to detect a buried ∑3 {112} grain boundary and observe the dynamic arrangements of single atoms and atom pairs with sub-angstrom resolution. These results mark an important step toward meeting the challenge of determining the three-dimensional atomic-scale structure of nanomaterials.

KW - Aberration-correcting optics

KW - Atomic structure

KW - Buried defect

KW - Sub-angstrom

KW - TEM/STEM

UR - http://www.scopus.com/inward/record.url?scp=52149103148&partnerID=8YFLogxK

U2 - 10.1017/S1431927608080902

DO - 10.1017/S1431927608080902

M3 - Article

AN - SCOPUS:52149103148

SN - 1431-9276

VL - 14

SP - 469

EP - 477

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - 5

ER -

Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-Å information limit

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Keywords

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