Detection of electromagnetic waves using MEMS antennas

P. G. Datskos, N. V. Lavrik, J. Tobin, L. T. Bowland

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We describe the design, fabrication and characterization of simple micromechanical structures that are capable of sensing static electric time varying electromagnetic fields. Time varying electric field sensing is usually achieved using an electromagnetic antenna and a receiver. However, these antenna-based approaches do not exhibit high sensitivity over a broad frequency (or wavelength) range. An important aspect of the present work is that, in contrast to traditional antennas, the dimensions of these micromechanical oscillators can be much smaller than the wavelength of the electromagnetic wave. We characterized the fabricated micromechanical oscillators by measuring their responses to time varying electric and electromagnetic fields.

Original languageEnglish
Title of host publicationUnattended Ground, Sea, and Air Sensor Technologies and Applications XIII
DOIs
StatePublished - 2011
EventUnattended Ground, Sea, and Air Sensor Technologies and Applications XIII - Orlando, FL, United States
Duration: Apr 28 2011Apr 29 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8046
ISSN (Print)0277-786X

Conference

ConferenceUnattended Ground, Sea, and Air Sensor Technologies and Applications XIII
Country/TerritoryUnited States
CityOrlando, FL
Period04/28/1104/29/11

Keywords

  • Antenna
  • Electromagnetic field
  • MEMS
  • Oscillator

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