Abstract
We describe micromechanical structures that are capable of sensing both electrostatic fields and electromagnetic fields over a wide frequency range. Typically, sensing of electromagnetic waves is achieved with electrically conducting antennas, which despite the many advantages do not exhibit high sensitivity over a broad frequency range. An important aspect of our present work is that, in contrast to traditional antennas, the dimensions of micromechanical oscillators sensitive to electromagnetic waves can be much smaller than the wavelength. We characterized the micromechanical oscillators and measured responses to electric fields and estimated the performance limits by evaluating the signal-to-noise ratio theoretically and experimentally.
Original language | English |
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Article number | 103108 |
Journal | Applied Physics Letters |
Volume | 100 |
Issue number | 10 |
DOIs | |
State | Published - Mar 5 2012 |
Funding
The work performed was supported by the Laboratory Director’s Research and Development Program of Oak Ridge National Laboratory. A portion of this research was conducted at the Center for Nanophase Materials Sciences, which is sponsored at Oak Ridge National Laboratory by the Scientific User Facilities Division, Office of Basic Energy Sciences, U.S. Department of Energy; Oak Ridge National Laboratory is operated for the U.S. Department of Energy by UT-Battelle under Contract No. DE-AC05-00OR22725.
Funders | Funder number |
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Scientific User Facilities Division | |
U.S. Department of Energy | |
Basic Energy Sciences | |
Oak Ridge National Laboratory | |
UT-Battelle | DE-AC05-00OR22725 |