TY - GEN
T1 - Design of a high particle flux hydrogen helicon plasma source for used in plasma materials interaction studies
AU - Goulding, R. H.
AU - Chen, G.
AU - Meitner, S.
AU - Baity, F. W.
AU - Caughman, J. B.O.
AU - Owen, L.
PY - 2009
Y1 - 2009
N2 - Existing linear plasma materials interaction (PMI) facilities all use plasma sources with internal electrodes. An rf-based helicon source is of interest because high plasma densities can be generated with no internal electrodes, allowing true steady state operation with minimal impurity generation. Work has begun at Oak Ridge National Laboratory (ORNL) to develop a large (15 cm) diameter helicon source producing hydrogen plasmas with parameters suitable for use in a linear PMI device: ne≥1019m -3, Te=4-10eV, particle flux Γp> 1023m-3s-1, and magnetic field strength [B] up to 1 T in the source region. The device, whose design is based on a previous hydrogen helicon source operated at ORNL[1], will operate at rf frequencies in the range 10-26 MHz, and power levels up to ∼100 kW. Limitations in cooling will prevent operation for pulses longer than several seconds, but a major goal will be the measurement of power deposition on device structures so that a later steady state version can be designed. The device design, the diagnostics to be used, and results of rf modeling of the device will be discussed. These include calculations of plasma loading, resulting currents and voltages in antenna structures and the matching network, power deposition profiles, and the effect of high |B| operation on power absorption.
AB - Existing linear plasma materials interaction (PMI) facilities all use plasma sources with internal electrodes. An rf-based helicon source is of interest because high plasma densities can be generated with no internal electrodes, allowing true steady state operation with minimal impurity generation. Work has begun at Oak Ridge National Laboratory (ORNL) to develop a large (15 cm) diameter helicon source producing hydrogen plasmas with parameters suitable for use in a linear PMI device: ne≥1019m -3, Te=4-10eV, particle flux Γp> 1023m-3s-1, and magnetic field strength [B] up to 1 T in the source region. The device, whose design is based on a previous hydrogen helicon source operated at ORNL[1], will operate at rf frequencies in the range 10-26 MHz, and power levels up to ∼100 kW. Limitations in cooling will prevent operation for pulses longer than several seconds, but a major goal will be the measurement of power deposition on device structures so that a later steady state version can be designed. The device design, the diagnostics to be used, and results of rf modeling of the device will be discussed. These include calculations of plasma loading, resulting currents and voltages in antenna structures and the matching network, power deposition profiles, and the effect of high |B| operation on power absorption.
UR - https://www.scopus.com/pages/publications/73449124148
U2 - 10.1063/1.3273839
DO - 10.1063/1.3273839
M3 - Conference contribution
AN - SCOPUS:73449124148
SN - 9780735407534
T3 - AIP Conference Proceedings
SP - 667
EP - 670
BT - Radio Frequency Power in plasmas - Proceedings of the 18th Topical Conference
T2 - 18th Topical Conference on Radio Frequency Power in plasmas
Y2 - 24 June 2009 through 26 June 2009
ER -