Design, characterization, and performance of a hard x-ray transmission microscope at the National Synchrotron Light Source II 18-ID beamline

David Scott Coburn; Evgeny Nazaretski; Weihe Xu; Mingyuan Ge; Cindy Longo; Huijuan Xu; Kazimierz Gofron; Zhijian Yin; Huang Han Chen; Yeukuang Hwu; Wah Keat Lee

doi:10.1063/1.5088124

Design, characterization, and performance of a hard x-ray transmission microscope at the National Synchrotron Light Source II 18-ID beamline

David Scott Coburn
, Evgeny Nazaretski
, Weihe Xu
, Mingyuan Ge
, Cindy Longo
, Huijuan Xu
, Kazimierz Gofron
, Zhijian Yin
, Huang Han Chen
, Yeukuang Hwu
, Wah Keat Lee

Research output: Contribution to journal › Article › peer-review

33 Scopus citations

Abstract

A transmission X-ray microscope has been designed and commissioned at the 18-ID Full-field X-ray Imaging beamline at the National Synchrotron Light Source II. This instrument operates in the 5-11 keV range, and, with the current set of optics, is capable of 30 nm spatial resolution imaging, with a field of view of about 40 μm. For absorption contrast, the minimum exposure time for a single projection image is about 20 ms and an entire 3D tomography data set can be acquired in under 1 min. The system enables tomographic reconstructions with sub-50 nm spatial resolution without the use of markers on the sample or corrections for rotation run-outs.

Original language	English
Article number	053701
Journal	Review of Scientific Instruments
Volume	90
Issue number	5
DOIs	https://doi.org/10.1063/1.5088124
State	Published - May 1 2019
Externally published	Yes

Funding

This research used the 18-ID (FXI) beamline of the National Synchrotron Light Source II, a U.S. Department of Energy (DOE) Office of Science User Facility operated for the DOE Office of Science by the Brookhaven National Laboratory under Contract No. DE-SC0012704. The authors also acknowledge useful discussions with Vincent de Andrade and Francesco De Carlo of the Advanced Photon Source at the Argonne National Laboratory.

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10.1063/1.5088124

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title = "Design, characterization, and performance of a hard x-ray transmission microscope at the National Synchrotron Light Source II 18-ID beamline",

abstract = "A transmission X-ray microscope has been designed and commissioned at the 18-ID Full-field X-ray Imaging beamline at the National Synchrotron Light Source II. This instrument operates in the 5-11 keV range, and, with the current set of optics, is capable of 30 nm spatial resolution imaging, with a field of view of about 40 μm. For absorption contrast, the minimum exposure time for a single projection image is about 20 ms and an entire 3D tomography data set can be acquired in under 1 min. The system enables tomographic reconstructions with sub-50 nm spatial resolution without the use of markers on the sample or corrections for rotation run-outs.",

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AU - Coburn, David Scott

AU - Nazaretski, Evgeny

AU - Xu, Weihe

AU - Ge, Mingyuan

AU - Longo, Cindy

AU - Xu, Huijuan

AU - Gofron, Kazimierz

AU - Yin, Zhijian

AU - Chen, Huang Han

AU - Hwu, Yeukuang

AU - Lee, Wah Keat

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Design, characterization, and performance of a hard x-ray transmission microscope at the National Synchrotron Light Source II 18-ID beamline

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