Design and implementation of a magnetic drive retrofit to the Vacuum Generator's venetian style viewport shutter assembly

C. M. Rouleau, R. M. Park

Research output: Contribution to journalLetterpeer-review

Original languageEnglish
Pages (from-to)464-465
Number of pages2
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume11
Issue number2
DOIs
StatePublished - Mar 1993
Externally publishedYes

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