Depth sectioning with the aberration-corrected scanning transmission electron microscope

Albina Y. Borisevich, Andrew R. Lupini, Stephen J. Pennycook

Research output: Contribution to journalArticlepeer-review

194 Scopus citations

Abstract

The ability to correct the aberrations of the probe-forming lens in the scanning transmission electron microscope provides not only a significant improvement in transverse resolution but in addition brings depth resolution at the nanometer scale. Aberration correction therefore opens up the possibility of 3D imaging by optical sectioning. Here we develop a definition for the depth resolution for scanning transmission electron microscope depth sectioning and present initial results from this method. Objects such as catalytic metal clusters and single atoms on various support materials are imaged in three dimensions with a resolution of several nanometers. Effective focal depth is determined by statistical analysis and the contributing factors are discussed. Finally, current challenges and future capabilities available through new instruments are discussed.

Original languageEnglish
Pages (from-to)3044-3048
Number of pages5
JournalProceedings of the National Academy of Sciences of the United States of America
Volume103
Issue number9
DOIs
StatePublished - Feb 28 2006

Keywords

  • Aberration correction
  • Electron microscopy
  • Single-atom imaging

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