TY - JOUR
T1 - Deposition studies and coordinated characterization of MOCVD YBCO films on IBAD-MgO templates
AU - Aytug, T.
AU - Paranthaman, M.
AU - Heatherly, L.
AU - Zuev, Y.
AU - Zhang, Y.
AU - Kim, K.
AU - Goyal, A.
AU - Maroni, V. A.
AU - Chen, Y.
AU - Selvamanickam, V.
PY - 2009/1/1
Y1 - 2009/1/1
N2 - A recently installed research-scale metal-organic chemical vapor deposition (MOCVD) system at Oak Ridge National Laboratory, provided by SuperPower, Inc., has been used to investigate processing variables for MOCVD YBCO precursors and trends in the resulting properties. Systematic studies of YBCO film growth on LaMnO3/IBAD-MgO templates were carried out by optimizing deposition temperature and oxygen flow rate. Microstructural and superconducting properties of the YBCO films were analyzed by x-ray diffraction, scanning electron microscopy and transport measurements. The identification of intermediate phases formed during the YBCO precursor transformation was investigated by coordinated reel-to-reel Raman microprobe analysis. With this combination of various characterization techniques, an improved understanding of the growth characteristics of MOCVD YBCO films was established. Finally, critical current densities greater than 2MAcm-2 for film thicknesses of 0.8νm were demonstrated.
AB - A recently installed research-scale metal-organic chemical vapor deposition (MOCVD) system at Oak Ridge National Laboratory, provided by SuperPower, Inc., has been used to investigate processing variables for MOCVD YBCO precursors and trends in the resulting properties. Systematic studies of YBCO film growth on LaMnO3/IBAD-MgO templates were carried out by optimizing deposition temperature and oxygen flow rate. Microstructural and superconducting properties of the YBCO films were analyzed by x-ray diffraction, scanning electron microscopy and transport measurements. The identification of intermediate phases formed during the YBCO precursor transformation was investigated by coordinated reel-to-reel Raman microprobe analysis. With this combination of various characterization techniques, an improved understanding of the growth characteristics of MOCVD YBCO films was established. Finally, critical current densities greater than 2MAcm-2 for film thicknesses of 0.8νm were demonstrated.
UR - http://www.scopus.com/inward/record.url?scp=58149498607&partnerID=8YFLogxK
U2 - 10.1088/0953-2048/22/1/015008
DO - 10.1088/0953-2048/22/1/015008
M3 - Article
AN - SCOPUS:58149498607
SN - 0953-2048
VL - 22
JO - Superconductor Science and Technology
JF - Superconductor Science and Technology
IS - 1
M1 - 015008
ER -