Deposition and characterization of α-Fe2O3/Pd thin films for neutron reflectometry studies

Hanyu Wang, Ethan C. Self, Sadhvikas J. Addamane, Christopher M. Rouleau, Ryan R. Wixom, Katie L. Browning, Gabriel M. Veith, Liyuan Liang, James F. Browning

Research output: Contribution to journalArticlepeer-review

Abstract

We report deposition of hematite/Pd thin films on silicon wafers via radio frequency (RF) magnetron sputtering and subsequent characterization for future in situ neutron reflectometry studies. Following deposition, the hematite/Pd thin films were characterized as prepared and after annealing in air for 2h at 400, 500, and 600 °C, respectively. Raman spectroscopy, grazing incidence x-ray diffraction, and neutron reflectometry (NR) were used to characterize the structure and chemical compositions of the thin films. The results indicate that pure α-Fe2O3 (hematite) films were produced, free from other iron oxide phases and impurities. NR data reveal that one intermediate layer between the Pd layer and the hematite layer was formed during sputtering deposition processes. The fitted scattering length density (SLD) of the as-deposited hematite layer is 70% of the theoretical SLD value, indicating that the grains are loosely packed in the RF-deposited hematite films. After annealing at elevated temperatures, the hematite films show increased SLD values but remain comparable to that of preannealed.

Original languageEnglish
Article number053202
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume41
Issue number5
DOIs
StatePublished - Sep 1 2023

Funding

Magnetron sputtering was conducted as part of a user project at the Center for Nanophase Materials Sciences (CNMS), which is a U.S. Department of Energy, Office of Science User Facility at Oak Ridge National Laboratory. A portion of this research used resources at the SNS, a Department of Energy (DOE) Office of Science User Facility operated by ORNL. Neutron reflectometry measurements were carried out on the Liquids Reflectometer at the SNS, which is sponsored by the Scientific User Facilities Division, Office of Basic Energy Sciences, DOE. We acknowledge support from the Laboratory Directed Research and Development Program of Oak Ridge National Laboratory, managed by UT-Battelle, LLC, for the U.S. Department of Energy (Project ID 8174), under Contract No. DE-AC05-00OR22725 with the U.S. Department of Energy. The United States Government retains and the publisher, by accepting the article for publication, acknowledges that the United States Government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this manuscript, or allow others to do so, for United States Government purposes. The Department of Energy will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan (http://energy.gov/downloads/doepublic-access-plan). Grazing incident x-ray diffraction was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated by the U.S. Department of Energy (DOE) Office of Science. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology and Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International, Inc., for the U.S. DOE’s National Nuclear Security Administration under Contract No. DE-NA-0003525. The views expressed in the article do not necessarily represent the views of the U.S. DOE or the United States Government. Magnetron sputtering was conducted as part of a user project at the Center for Nanophase Materials Sciences (CNMS), which is a U.S. Department of Energy, Office of Science User Facility at Oak Ridge National Laboratory. A portion of this research used resources at the SNS, a Department of Energy (DOE) Office of Science User Facility operated by ORNL. Neutron reflectometry measurements were carried out on the Liquids Reflectometer at the SNS, which is sponsored by the Scientific User Facilities Division, Office of Basic Energy Sciences, DOE. We acknowledge support from the Laboratory Directed Research and Development Program of Oak Ridge National Laboratory, managed by UT-Battelle, LLC, for the U.S. Department of Energy (Project ID 8174), under Contract No. DE-AC05-00OR22725 with the U.S. Department of Energy. The United States Government retains and the publisher, by accepting the article for publication, acknowledges that the United States Government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this manuscript, or allow others to do so, for United States Government purposes. The Department of Energy will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan ( http://energy.gov/downloads/doepublic-access-plan ). Grazing incident x-ray diffraction was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated by the U.S. Department of Energy (DOE) Office of Science. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology and Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International, Inc., for the U.S. DOE’s National Nuclear Security Administration under Contract No. DE-NA-0003525. The views expressed in the article do not necessarily represent the views of the U.S. DOE or the United States Government.

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