@inproceedings{65527019fc39435a8530a0969b65387f,
title = "Deposited low temperature silicon GHz modulator",
abstract = "We demonstrate multi gigahertz polysilicon electro-optic modulator fabricated using low temperature excimer laser annealing technique compatible with CMOS backend integration. Carrier injection modulation at 3 Gbps is achieved.",
author = "Lee, \{Yoon Ho Daniel\} and Thompson, \{Michael O.\} and Michal Lipson",
year = "2013",
doi = "10.1364/cleo\_si.2013.ctu2f.5",
language = "English",
isbn = "9781557529725",
series = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
publisher = "IEEE Computer Society",
booktitle = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
note = "2013 Conference on Lasers and Electro-Optics, CLEO 2013 ; Conference date: 09-06-2013 Through 14-06-2013",
}