Deposited low temperature silicon GHz modulator

Yoon Ho Daniel Lee; Michael O. Thompson; Michal Lipson

doi:10.1364/OE.21.026688

Deposited low temperature silicon GHz modulator

Yoon Ho Daniel Lee
, Michael O. Thompson
, Michal Lipson

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

We demonstrate gigahertz electro-optic modulator fabricated on low temperature polysilicon using excimer laser annealing technique compatible with CMOS backend integration. Carrier injection modulation at 3 Gbps is achieved. These results open up an array of possibilities for silicon photonics including photonics on DRAM and on flexible substrates.

Original language	English
Pages (from-to)	26688-26692
Number of pages	5
Journal	Optics Express
Volume	21
Issue number	22
DOIs	https://doi.org/10.1364/OE.21.026688
State	Published - Nov 4 2013
Externally published	Yes

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title = "Deposited low temperature silicon GHz modulator",

abstract = "We demonstrate gigahertz electro-optic modulator fabricated on low temperature polysilicon using excimer laser annealing technique compatible with CMOS backend integration. Carrier injection modulation at 3 Gbps is achieved. These results open up an array of possibilities for silicon photonics including photonics on DRAM and on flexible substrates.",

author = "Lee, \{Yoon Ho Daniel\} and Thompson, \{Michael O.\} and Michal Lipson",

year = "2013",

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doi = "10.1364/OE.21.026688",

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AU - Lee, Yoon Ho Daniel

AU - Thompson, Michael O.

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AB - We demonstrate gigahertz electro-optic modulator fabricated on low temperature polysilicon using excimer laser annealing technique compatible with CMOS backend integration. Carrier injection modulation at 3 Gbps is achieved. These results open up an array of possibilities for silicon photonics including photonics on DRAM and on flexible substrates.

UR - https://www.scopus.com/pages/publications/84887463863

U2 - 10.1364/OE.21.026688

DO - 10.1364/OE.21.026688

M3 - Article

AN - SCOPUS:84887463863

SN - 1094-4087

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JO - Optics Express

JF - Optics Express

IS - 22

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Deposited low temperature silicon GHz modulator

Abstract

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