Abstract
We have studied the formation of cuspidal pits during the growth of strained SixGe1-x alloy layers at relatively high supersaturations. The pit formation is directly linked to strain in the alloy layer, and we propose a heterogeneous formation mechanism in which the pits develop from stress-driven surface diffusion associated with a localized initial perturbation of the buffer layer surface.
Original language | English |
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Pages (from-to) | 34 |
Number of pages | 1 |
Journal | Applied Physics Letters |
DOIs | |
State | Published - 1995 |