Cuspidal pit formation during the growth of SixGe1-x strained films

K. M. Chen, D. E. Jesson, S. J. Pennycook, T. Thundat, R. J. Warmack

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

We have studied the formation of cuspidal pits during the growth of strained SixGe1-x alloy layers at relatively high supersaturations. The pit formation is directly linked to strain in the alloy layer, and we propose a heterogeneous formation mechanism in which the pits develop from stress-driven surface diffusion associated with a localized initial perturbation of the buffer layer surface.

Original languageEnglish
Pages (from-to)34
Number of pages1
JournalApplied Physics Letters
DOIs
StatePublished - 1995

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