CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY PULSED ION BEAM ANNEALING.

J. Gyulai; R. Fastow; K. Kavanagh; M. O. Thompson; C. J. Palmstrom; C. A. Hewett; J. W. Mayer

CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY PULSED ION BEAM ANNEALING.

J. Gyulai
, R. Fastow
, K. Kavanagh
, M. O. Thompson
, C. J. Palmstrom
, C. A. Hewett
, J. W. Mayer

Alloy Behavior & Design

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Original language	English
Title of host publication	Materials Research Society Symposia Proceedings
Editors	Jaydish Narayan, Walter Lyons Brown, Ross A. Lemons
Pages	455-460
Number of pages	6
State	Published - 1983

Publication series

Name	Materials Research Society Symposia Proceedings
Volume	13
ISSN (Print)	0272-9172

Cite this

@inproceedings{36219a1d17f14706b690567842048c01,

title = "CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY PULSED ION BEAM ANNEALING.",

author = "J. Gyulai and R. Fastow and K. Kavanagh and Thompson, \{M. O.\} and Palmstrom, \{C. J.\} and Hewett, \{C. A.\} and Mayer, \{J. W.\}",

year = "1983",

language = "English",

isbn = "0444007881",

series = "Materials Research Society Symposia Proceedings",

pages = "455--460",

editor = "Jaydish Narayan and Brown, \{Walter Lyons\} and Lemons, \{Ross A.\}",

booktitle = "Materials Research Society Symposia Proceedings",

}

CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY PULSED ION BEAM ANNEALING. / Gyulai, J.; Fastow, R.; Kavanagh, K. et al.
Materials Research Society Symposia Proceedings. ed. / Jaydish Narayan; Walter Lyons Brown; Ross A. Lemons. 1983. p. 455-460 (Materials Research Society Symposia Proceedings; Vol. 13).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY PULSED ION BEAM ANNEALING.

AU - Gyulai, J.

AU - Fastow, R.

AU - Kavanagh, K.

AU - Thompson, M. O.

AU - Palmstrom, C. J.

AU - Hewett, C. A.

AU - Mayer, J. W.

PY - 1983

Y1 - 1983

UR - https://www.scopus.com/pages/publications/0020887491

M3 - Conference contribution

AN - SCOPUS:0020887491

SN - 0444007881

T3 - Materials Research Society Symposia Proceedings

SP - 455

EP - 460

BT - Materials Research Society Symposia Proceedings

A2 - Narayan, Jaydish

A2 - Brown, Walter Lyons

A2 - Lemons, Ross A.

ER -

CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY PULSED ION BEAM ANNEALING.

Publication series

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