Corrigendum to “A methodology for customizing implantation profiles of light ions using a single thin foil energy degrader” [Nucl. Instrum. Methods Phys. Res. 478 (2020) 274–283](S0168583X20303475)(10.1016/j.nimb.2020.07.017)

Stephen Taller, Fabian Naab, Gary S. Was

Research output: Contribution to journalComment/debate

Abstract

The Authors regret that the ordinate axis label on Figs. 10, 11, and 13 were incorrectly labeled in the above paper. The ordinate in the published paper is in units of at.% while the data reported was in atom fraction. Although the unit label is modified, the data contained in each figure and the conclusions of the article remain unchanged.

Original languageEnglish
Pages (from-to)44-45
Number of pages2
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume493
DOIs
StatePublished - Apr 15 2021
Externally publishedYes

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