Correcting nonlinear drift distortion of scanning probe and scanning transmission electron microscopies from image pairs with orthogonal scan directions

Colin Ophus, Jim Ciston, Chris T. Nelson

Research output: Contribution to journalArticlepeer-review

165 Scopus citations

Abstract

Unwanted motion of the probe with respect to the sample is a ubiquitous problem in scanning probe and scanning transmission electron microscopies, causing both linear and nonlinear artifacts in experimental images. We have designed a procedure to correct these artifacts by using orthogonal scan pairs to align each measurement line-by-line along the slow scan direction, by fitting contrast variation along the lines. We demonstrate the accuracy of our algorithm on both synthetic and experimental data and provide an implementation of our method.

Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalUltramicroscopy
Volume162
DOIs
StatePublished - Mar 1 2016
Externally publishedYes

Funding

We thank Wolfgang Theis, Peter Ercius, Mary Scott and Matt Bowers for helpful discussions. Work at the Molecular Foundry was supported by the Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract no. DE-AC02-05CH11231 .

Keywords

  • Atomic resolution
  • Drift correction
  • Image processing
  • Scanning probe microscopy
  • Scanning transmission electron microscopy

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