Continuous composition-spread thin films of transition metal oxides by pulsed-laser deposition

I. Ohkubo; H. M. Christen; P. Khalifah; S. Sathyamurthy; H. Y. Zhai; C. M. Rouleau; D. G. Mandrus; D. H. Lowndes

doi:10.1016/S0169-4332(03)00914-0

Continuous composition-spread thin films of transition metal oxides by pulsed-laser deposition

I. Ohkubo, H. M. Christen, P. Khalifah, S. Sathyamurthy, H. Y. Zhai, C. M. Rouleau, D. G. Mandrus, D. H. Lowndes

Functional Hybrid Nanomaterials

Research output: Contribution to journal › Article › peer-review

48 Scopus citations

Abstract

We have designed an improved pulsed-laser deposition-continuous composition-spread (PLD-CCS) system that overcomes the difficulties associated with earlier related techniques. Our new PLD-CCS system is based on a precisely controlled synchronization between the laser firing, target exchange, and substrate translation/rotation, and offers more flexibility and control than earlier PLD-based approaches. Most importantly, the deposition energetics and the film thickness are kept constant across the entire composition range, and the resulting samples are sufficiently large to allow characterization by conventional techniques. We fabricated binary alloy composition-spread films composed of SrRuO ₃ and CaRuO ₃ . Alternating ablation from two different ceramic targets leads to in situ alloy formation, and the value of x in Sr _x Ca _x-1 RuO ₃ can be changed linearly from 0 to 1 (or over any arbitrarily smaller range) along one direction of the substrate.

Original language	English
Pages (from-to)	35-38
Number of pages	4
Journal	Applied Surface Science
Volume	223
Issue number	1-3
DOIs	https://doi.org/10.1016/S0169-4332(03)00914-0
State	Published - Feb 15 2004

Funding

This research was sponsored by the US Department of Energy under contract DE-AC05-00OR22725 with the Oak Ridge National Laboratory, managed by UT-Battelle, LLC, and in part by the Laboratory Directed Research and Development Program.

Keywords

Composition spread
Epitaxial thin films
PLD
Transition metal oxides

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10.1016/S0169-4332(03)00914-0

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@article{9e6667a9a86b4eacb78b4b63a886596e,

title = "Continuous composition-spread thin films of transition metal oxides by pulsed-laser deposition",

abstract = " We have designed an improved pulsed-laser deposition-continuous composition-spread (PLD-CCS) system that overcomes the difficulties associated with earlier related techniques. Our new PLD-CCS system is based on a precisely controlled synchronization between the laser firing, target exchange, and substrate translation/rotation, and offers more flexibility and control than earlier PLD-based approaches. Most importantly, the deposition energetics and the film thickness are kept constant across the entire composition range, and the resulting samples are sufficiently large to allow characterization by conventional techniques. We fabricated binary alloy composition-spread films composed of SrRuO 3 and CaRuO 3 . Alternating ablation from two different ceramic targets leads to in situ alloy formation, and the value of x in Sr x Ca x-1 RuO 3 can be changed linearly from 0 to 1 (or over any arbitrarily smaller range) along one direction of the substrate.",

keywords = "Composition spread, Epitaxial thin films, PLD, Transition metal oxides",

author = "I. Ohkubo and Christen, {H. M.} and P. Khalifah and S. Sathyamurthy and Zhai, {H. Y.} and Rouleau, {C. M.} and Mandrus, {D. G.} and Lowndes, {D. H.}",

year = "2004",

month = feb,

day = "15",

doi = "10.1016/S0169-4332(03)00914-0",

language = "English",

volume = "223",

pages = "35--38",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

number = "1-3",

}

TY - JOUR

T1 - Continuous composition-spread thin films of transition metal oxides by pulsed-laser deposition

AU - Ohkubo, I.

AU - Christen, H. M.

AU - Khalifah, P.

AU - Sathyamurthy, S.

AU - Zhai, H. Y.

AU - Rouleau, C. M.

AU - Mandrus, D. G.

AU - Lowndes, D. H.

PY - 2004/2/15

Y1 - 2004/2/15

N2 - We have designed an improved pulsed-laser deposition-continuous composition-spread (PLD-CCS) system that overcomes the difficulties associated with earlier related techniques. Our new PLD-CCS system is based on a precisely controlled synchronization between the laser firing, target exchange, and substrate translation/rotation, and offers more flexibility and control than earlier PLD-based approaches. Most importantly, the deposition energetics and the film thickness are kept constant across the entire composition range, and the resulting samples are sufficiently large to allow characterization by conventional techniques. We fabricated binary alloy composition-spread films composed of SrRuO 3 and CaRuO 3 . Alternating ablation from two different ceramic targets leads to in situ alloy formation, and the value of x in Sr x Ca x-1 RuO 3 can be changed linearly from 0 to 1 (or over any arbitrarily smaller range) along one direction of the substrate.

AB - We have designed an improved pulsed-laser deposition-continuous composition-spread (PLD-CCS) system that overcomes the difficulties associated with earlier related techniques. Our new PLD-CCS system is based on a precisely controlled synchronization between the laser firing, target exchange, and substrate translation/rotation, and offers more flexibility and control than earlier PLD-based approaches. Most importantly, the deposition energetics and the film thickness are kept constant across the entire composition range, and the resulting samples are sufficiently large to allow characterization by conventional techniques. We fabricated binary alloy composition-spread films composed of SrRuO 3 and CaRuO 3 . Alternating ablation from two different ceramic targets leads to in situ alloy formation, and the value of x in Sr x Ca x-1 RuO 3 can be changed linearly from 0 to 1 (or over any arbitrarily smaller range) along one direction of the substrate.

KW - Composition spread

KW - Epitaxial thin films

KW - PLD

KW - Transition metal oxides

UR - http://www.scopus.com/inward/record.url?scp=0347565983&partnerID=8YFLogxK

U2 - 10.1016/S0169-4332(03)00914-0

DO - 10.1016/S0169-4332(03)00914-0

M3 - Article

AN - SCOPUS:0347565983

SN - 0169-4332

VL - 223

SP - 35

EP - 38

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-3

ER -

Continuous composition-spread thin films of transition metal oxides by pulsed-laser deposition

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