Construction and performance of an ultrahigh vacuum-compatible high temperature vapor dosing system for low vapor pressure compounds

L. Thompson; J. G. Lee; P. Maksymovych; J. Ahner; J. T. Yates

doi:10.1116/1.1550011

Construction and performance of an ultrahigh vacuum-compatible high temperature vapor dosing system for low vapor pressure compounds

L. Thompson, J. G. Lee, P. Maksymovych, J. Ahner, J. T. Yates

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

The construction and performance of an ultrahigh vacuum-compatible high temperature vapor dosing system for low vapor pressure compounds were discussed. The dosing system was found to be maintained at elevated temperature to achieve sufficiently high gas pressure for rapid transfer to the surface. The analysis showed that the leak valve and the internal doser head were heated to a higher temperature than the source system to prevent condensation of the compound.

Original language	English
Pages (from-to)	491-494
Number of pages	4
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	21
Issue number	2
DOIs	https://doi.org/10.1116/1.1550011
State	Published - 2003
Externally published	Yes

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@article{23b793f94728439b8a9964090f03c010,

title = "Construction and performance of an ultrahigh vacuum-compatible high temperature vapor dosing system for low vapor pressure compounds",

abstract = "The construction and performance of an ultrahigh vacuum-compatible high temperature vapor dosing system for low vapor pressure compounds were discussed. The dosing system was found to be maintained at elevated temperature to achieve sufficiently high gas pressure for rapid transfer to the surface. The analysis showed that the leak valve and the internal doser head were heated to a higher temperature than the source system to prevent condensation of the compound.",

author = "L. Thompson and Lee, {J. G.} and P. Maksymovych and J. Ahner and Yates, {J. T.}",

year = "2003",

doi = "10.1116/1.1550011",

language = "English",

volume = "21",

pages = "491--494",

journal = "Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "American Vacuum Society",

number = "2",

}

TY - JOUR

T1 - Construction and performance of an ultrahigh vacuum-compatible high temperature vapor dosing system for low vapor pressure compounds

AU - Thompson, L.

AU - Lee, J. G.

AU - Maksymovych, P.

AU - Ahner, J.

AU - Yates, J. T.

PY - 2003

Y1 - 2003

N2 - The construction and performance of an ultrahigh vacuum-compatible high temperature vapor dosing system for low vapor pressure compounds were discussed. The dosing system was found to be maintained at elevated temperature to achieve sufficiently high gas pressure for rapid transfer to the surface. The analysis showed that the leak valve and the internal doser head were heated to a higher temperature than the source system to prevent condensation of the compound.

AB - The construction and performance of an ultrahigh vacuum-compatible high temperature vapor dosing system for low vapor pressure compounds were discussed. The dosing system was found to be maintained at elevated temperature to achieve sufficiently high gas pressure for rapid transfer to the surface. The analysis showed that the leak valve and the internal doser head were heated to a higher temperature than the source system to prevent condensation of the compound.

UR - http://www.scopus.com/inward/record.url?scp=0037348376&partnerID=8YFLogxK

U2 - 10.1116/1.1550011

DO - 10.1116/1.1550011

M3 - Article

AN - SCOPUS:0037348376

SN - 0734-2101

VL - 21

SP - 491

EP - 494

JO - Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

IS - 2

ER -

Construction and performance of an ultrahigh vacuum-compatible high temperature vapor dosing system for low vapor pressure compounds

Abstract

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