Computer-Controlled in Situ Gas Reactions via a MEMS-based Closed-Cell System

  • L. F. Allard
  • , W. C. Bigelow
  • , Z. Wu
  • , S. H. Overbury
  • , K. A. Unocic
  • , M. Chi
  • , W. B. Carpenter
  • , F. S. Walden
  • , R. L. Thomas
  • , D. S. Gardiner
  • , B. W. Jacobs
  • , D. P. Nackashi
  • , J. Damiano

Research output: Contribution to journalShort surveypeer-review

6 Scopus citations
Original languageEnglish
Pages (from-to)97-98
Number of pages2
JournalMicroscopy and Microanalysis
Volume21
Issue numberS3
DOIs
StatePublished - 2015

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