Abstract
The ability of lasers to carry out drilling processes in silicon carbide ceramic was investigated in this study. A JK 701 pulsed Nd:YAG laser was used for drilling through the entire depth of silicon carbide plates of different thicknesses. The laser parameters were varied in different combinations for a well-controlled drilling through the entire thickness of the SiC plates. A drilling model incorporating effects of various physical phenomena such as decomposition, evaporation-induced recoil pressure, and surface tension was developed. Such comprehensive model was capable of advance prediction of the energy and time required for drilling a hole through any desired depth of material.
| Original language | English |
|---|---|
| Pages (from-to) | 704-713 |
| Number of pages | 10 |
| Journal | International Journal of Advanced Manufacturing Technology |
| Volume | 45 |
| Issue number | 7-8 |
| DOIs | |
| State | Published - Dec 2009 |
Keywords
- Ceramic
- Drilling
- Nd:YAG laser
- Silicon carbide