Abstract
The ability of lasers to carry out drilling processes in silicon carbide ceramic was investigated in this study. A JK 701 pulsed Nd:YAG laser was used for drilling through the entire depth of silicon carbide plates of different thicknesses. The laser parameters were varied in different combinations for a well-controlled drilling through the entire thickness of the SiC plates. A drilling model incorporating effects of various physical phenomena such as decomposition, evaporation-induced recoil pressure, and surface tension was developed. Such comprehensive model was capable of advance prediction of the energy and time required for drilling a hole through any desired depth of material.
Original language | English |
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Pages (from-to) | 704-713 |
Number of pages | 10 |
Journal | International Journal of Advanced Manufacturing Technology |
Volume | 45 |
Issue number | 7-8 |
DOIs | |
State | Published - Dec 2009 |
Keywords
- Ceramic
- Drilling
- Nd:YAG laser
- Silicon carbide