Composition/structure/property relations of multi-ion-beam reactive sputtered lead lanthanum titanate thin films: Part I. Composition and structure analysis

G. R. Fox, L. F. Allard, S. B. Krupanidhi

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    37 Scopus citations

    Abstract

    Material properties are greatly dependent upon the structure of the material. This paper, the first of three parts, discusses how composition influences the crystallographic structure and microstructure of lead lanthanum titanate (PLT) thin films grown by the multi-ion-beam reactive sputtering (MIBERS) technique. A transmission electron microscopy (TEM) study detailing the relationship between crystallographic texturing and microstructure development will be presented in a second paper. The dependence of the ferroelectric properties on observed crystallographic structure and microstructure is presented in the third paper of this series. As-deposited PLT microstructures coincide with the structure zone model (SZM) which has been developed to describe the microstructure of thin films deposited by physical vapor deposition. The as-deposited PLT structures are altered during post-deposition annealing as a result of crystallization and PbO evaporation. Amorphous films with more than 10 mole % excess PbO become polycrystalline with porous microstructures after annealing. When there is less PbO in the as-deposited film, (100) texture and dense structures are observed. Porosity results from PbO evaporation, and (100) texture is inhibited by excess PbO.

    Original languageEnglish
    Pages (from-to)3039-3055
    Number of pages17
    JournalJournal of Materials Research
    Volume7
    Issue number11
    DOIs
    StatePublished - Nov 1992

    Funding

    The authors would like to thank Dr. Scott Atkinson for the DCPES analysis and Mark Angelone for the EPMA work. We would also like to acknowledge Dr. Russell Messier, Dr. Clive Randall, Dr. Susan Mckinstry, and Dr. Robert Newnham for helpful discussions. Special thanks are given to Roxanne Steele and Ted Nolan at the High Temperature Materials Laboratory. This work was funded by DARPA/ONR Grant N00014-89-J-1976. Research was partially sponsored by the United States Department of Energy, Assistant Secretary for Conservation and Renewable Energy, Office of Transportation Technologies, as part of the High Temperature Materials Laboratory User Program, under Contract DE-AC05-84OR21400 managed by Martin Marietta Energy Systems, Inc. Travel expenses to Oak Ridge National Laboratory were provided by Oak Ridge Associated Universities.

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